ITMI952254A0 - - Google Patents
Info
- Publication number
- ITMI952254A0 ITMI952254A0 ITMI952254A ITMI952254A ITMI952254A0 IT MI952254 A0 ITMI952254 A0 IT MI952254A0 IT MI952254 A ITMI952254 A IT MI952254A IT MI952254 A ITMI952254 A IT MI952254A IT MI952254 A0 ITMI952254 A0 IT MI952254A0
- Authority
- IT
- Italy
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Medicines Containing Plant Substances (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4439519A DE4439519C1 (en) | 1994-11-04 | 1994-11-04 | Appts. for vacuum coating strip with e.g. aluminium@ or dielectric |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI952254A0 true ITMI952254A0 (en) | 1995-10-31 |
ITMI952254A1 ITMI952254A1 (en) | 1997-05-01 |
IT1276064B1 IT1276064B1 (en) | 1997-10-24 |
Family
ID=6532547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT95MI002254A IT1276064B1 (en) | 1994-11-04 | 1995-10-31 | APPARATUS AND PROCEDURE FOR THE VACUUM VAPORIZATION OF FOILS |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE4439519C1 (en) |
IT (1) | IT1276064B1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19720026C2 (en) * | 1997-05-13 | 2000-08-10 | Martin Ruckh | Linear evaporator source for vacuum evaporation systems |
DE10249151B4 (en) * | 2001-10-11 | 2009-11-05 | Creavac - Creative Vakuumbeschichtung Gmbh | Device for single or multi-layer evaporation of substrates in a single sputtering process |
US20030111014A1 (en) * | 2001-12-18 | 2003-06-19 | Donatucci Matthew B. | Vaporizer/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
DE102004051290B4 (en) * | 2004-10-13 | 2007-07-12 | Creavac-Creative Vakuumbeschichtung Gmbh | Device for coating substrates by vapor deposition in an evacuable processing chamber |
ATE364098T1 (en) * | 2004-11-20 | 2007-06-15 | Applied Materials Gmbh & Co Kg | DEVICE FOR VAPORIZING MATERIALS |
JP4440837B2 (en) * | 2005-01-31 | 2010-03-24 | 三星モバイルディスプレイ株式會社 | Evaporation source and vapor deposition apparatus employing the same |
KR100711885B1 (en) * | 2005-08-31 | 2007-04-25 | 삼성에스디아이 주식회사 | Source for organic layer and the method for controlling heating source thereof |
KR100645689B1 (en) | 2005-08-31 | 2006-11-14 | 삼성에스디아이 주식회사 | Linear type deposition source |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3244857A (en) * | 1963-12-23 | 1966-04-05 | Ibm | Vapor deposition source |
DE3530106A1 (en) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | VAPORIZATION MATERIAL FOR VAPORIZING INORGANIC COMPOUNDS BY MEANS OF A PHOTON-GENERATING RADIATION HEATING SOURCE IN CONTINUOUSLY OPERATED VACUUM VACUUM DEVICES |
DE3632027C1 (en) * | 1986-09-20 | 1988-02-18 | Rudnay Andre Dr De | Process and vacuum vapor deposition system for metallizing foil surfaces |
DE4104415C1 (en) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De |
-
1994
- 1994-11-04 DE DE4439519A patent/DE4439519C1/en not_active Expired - Fee Related
-
1995
- 1995-10-31 IT IT95MI002254A patent/IT1276064B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ITMI952254A1 (en) | 1997-05-01 |
IT1276064B1 (en) | 1997-10-24 |
DE4439519C1 (en) | 1996-04-25 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted |