IT947673B - Procedimento atto a impedire o at tenuare l autodrogaggio o diffusio ne spontanea di impurita in dispo sitivi semiconduttori - Google Patents
Procedimento atto a impedire o at tenuare l autodrogaggio o diffusio ne spontanea di impurita in dispo sitivi semiconduttoriInfo
- Publication number
- IT947673B IT947673B IT20712/72A IT2071272A IT947673B IT 947673 B IT947673 B IT 947673B IT 20712/72 A IT20712/72 A IT 20712/72A IT 2071272 A IT2071272 A IT 2071272A IT 947673 B IT947673 B IT 947673B
- Authority
- IT
- Italy
- Prior art keywords
- sitive
- semiconductive
- impurities
- keeping
- drop
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
- H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
- H10P32/15—Diffusion of dopants within, into or out of semiconductor bodies or layers from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13456671A | 1971-04-16 | 1971-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT947673B true IT947673B (it) | 1973-05-30 |
Family
ID=22463938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT20712/72A IT947673B (it) | 1971-04-16 | 1972-02-18 | Procedimento atto a impedire o at tenuare l autodrogaggio o diffusio ne spontanea di impurita in dispo sitivi semiconduttori |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5029788B1 (it) |
| CA (1) | CA960943A (it) |
| DE (1) | DE2214996A1 (it) |
| FR (1) | FR2133598B1 (it) |
| GB (1) | GB1314149A (it) |
| IT (1) | IT947673B (it) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5627935A (en) * | 1979-08-15 | 1981-03-18 | Toshiba Corp | Semiconductor device |
| WO2004064131A2 (de) * | 2003-01-10 | 2004-07-29 | Infineon Technologies Ag | Verfahren zur epitaktischen abscheidung von schichten |
| WO2016204005A1 (ja) | 2015-06-15 | 2016-12-22 | 新日鐵住金株式会社 | 高Ｃｒ系オーステナイトステンレス鋼 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3483108A (en) * | 1967-05-29 | 1969-12-09 | Gen Electric | Method of chemically etching a non-conductive material using an electrolytically controlled mask |
-
1972
- 1972-02-18 IT IT20712/72A patent/IT947673B/it active
- 1972-03-10 JP JP47024077A patent/JPS5029788B1/ja active Pending
- 1972-03-16 GB GB1332172A patent/GB1314149A/en not_active Expired
- 1972-03-28 FR FR7211399A patent/FR2133598B1/fr not_active Expired
- 1972-03-28 DE DE19722214996 patent/DE2214996A1/de active Pending
- 1972-04-12 CA CA139,469A patent/CA960943A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5029788B1 (it) | 1975-09-26 |
| GB1314149A (en) | 1973-04-18 |
| FR2133598A1 (it) | 1972-12-01 |
| DE2214996A1 (de) | 1972-10-26 |
| FR2133598B1 (it) | 1976-06-11 |
| CA960943A (en) | 1975-01-14 |
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