IT8919009A0 - Dispositivo di comando dell'erogazione di gas a purezza elevata. - Google Patents

Dispositivo di comando dell'erogazione di gas a purezza elevata.

Info

Publication number
IT8919009A0
IT8919009A0 IT8919009A IT1900989A IT8919009A0 IT 8919009 A0 IT8919009 A0 IT 8919009A0 IT 8919009 A IT8919009 A IT 8919009A IT 1900989 A IT1900989 A IT 1900989A IT 8919009 A0 IT8919009 A0 IT 8919009A0
Authority
IT
Italy
Prior art keywords
control device
gas supply
high purity
supply control
purity gas
Prior art date
Application number
IT8919009A
Other languages
English (en)
Other versions
IT1228197B (it
Inventor
Paola Della Porta
Original Assignee
Ilano
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ilano filed Critical Ilano
Priority to IT8919009A priority Critical patent/IT1228197B/it
Publication of IT8919009A0 publication Critical patent/IT8919009A0/it
Priority to US07/451,183 priority patent/US4991619A/en
Priority to CA 2006331 priority patent/CA2006331A1/en
Priority to JP33883489A priority patent/JP2709858B2/ja
Priority to DE89830572T priority patent/DE68911118T2/de
Priority to EP19890830572 priority patent/EP0377418B1/en
Application granted granted Critical
Publication of IT1228197B publication Critical patent/IT1228197B/it

Links

IT8919009A 1989-01-04 1989-01-04 Dispositivo di comando dell'erogazione di gas a purezza elevata. IT1228197B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT8919009A IT1228197B (it) 1989-01-04 1989-01-04 Dispositivo di comando dell'erogazione di gas a purezza elevata.
US07/451,183 US4991619A (en) 1989-01-04 1989-12-15 High purity gas delivery control assembly
CA 2006331 CA2006331A1 (en) 1989-01-04 1989-12-21 High purity gas delivery assembly
JP33883489A JP2709858B2 (ja) 1989-01-04 1989-12-28 高純度ガス送達アセンブリ
DE89830572T DE68911118T2 (de) 1989-01-04 1989-12-29 Einrichtung zur Abgabe hochreiner Gase.
EP19890830572 EP0377418B1 (en) 1989-01-04 1989-12-29 High purity gas delivery assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8919009A IT1228197B (it) 1989-01-04 1989-01-04 Dispositivo di comando dell'erogazione di gas a purezza elevata.

Publications (2)

Publication Number Publication Date
IT8919009A0 true IT8919009A0 (it) 1989-01-04
IT1228197B IT1228197B (it) 1991-06-05

Family

ID=11153819

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8919009A IT1228197B (it) 1989-01-04 1989-01-04 Dispositivo di comando dell'erogazione di gas a purezza elevata.

Country Status (1)

Country Link
IT (1) IT1228197B (it)

Also Published As

Publication number Publication date
IT1228197B (it) 1991-06-05

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19931229