IT8706618A0 - PROCEDURE FOR THE ELIMINATION OF CHLORINE CONTAMINATION OF SEMICONDUCTOR SUBSTRATES - Google Patents

PROCEDURE FOR THE ELIMINATION OF CHLORINE CONTAMINATION OF SEMICONDUCTOR SUBSTRATES

Info

Publication number
IT8706618A0
IT8706618A0 IT8706618A IT661887A IT8706618A0 IT 8706618 A0 IT8706618 A0 IT 8706618A0 IT 8706618 A IT8706618 A IT 8706618A IT 661887 A IT661887 A IT 661887A IT 8706618 A0 IT8706618 A0 IT 8706618A0
Authority
IT
Italy
Prior art keywords
elimination
procedure
semiconductor substrates
chlorine contamination
contamination
Prior art date
Application number
IT8706618A
Other languages
Italian (it)
Other versions
IT1224181B (en
Inventor
Lanza Paolo
Vasques Patrizia
Original Assignee
S G S Microelettronica S P A O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S G S Microelettronica S P A O filed Critical S G S Microelettronica S P A O
Priority to IT06618/87A priority Critical patent/IT1224181B/en
Publication of IT8706618A0 publication Critical patent/IT8706618A0/en
Application granted granted Critical
Publication of IT1224181B publication Critical patent/IT1224181B/en

Links

IT06618/87A 1987-07-06 1987-07-06 PROCEDURE FOR THE ELIMINATION OF CLUR CONTAMINATION OF SEMICONDUCTIVE SUBSTRATES IT1224181B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT06618/87A IT1224181B (en) 1987-07-06 1987-07-06 PROCEDURE FOR THE ELIMINATION OF CLUR CONTAMINATION OF SEMICONDUCTIVE SUBSTRATES

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT06618/87A IT1224181B (en) 1987-07-06 1987-07-06 PROCEDURE FOR THE ELIMINATION OF CLUR CONTAMINATION OF SEMICONDUCTIVE SUBSTRATES

Publications (2)

Publication Number Publication Date
IT8706618A0 true IT8706618A0 (en) 1987-07-06
IT1224181B IT1224181B (en) 1990-09-26

Family

ID=11121495

Family Applications (1)

Application Number Title Priority Date Filing Date
IT06618/87A IT1224181B (en) 1987-07-06 1987-07-06 PROCEDURE FOR THE ELIMINATION OF CLUR CONTAMINATION OF SEMICONDUCTIVE SUBSTRATES

Country Status (1)

Country Link
IT (1) IT1224181B (en)

Also Published As

Publication number Publication date
IT1224181B (en) 1990-09-26

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Effective date: 19960731