IT8220151A0 - Procedimento per la rigenerazione di clorosilani e di idrogeno nonreagiti nel corso della preparazione di silicio policristallino semiconduttore - Google Patents

Procedimento per la rigenerazione di clorosilani e di idrogeno nonreagiti nel corso della preparazione di silicio policristallino semiconduttore

Info

Publication number
IT8220151A0
IT8220151A0 IT8220151A IT2015182A IT8220151A0 IT 8220151 A0 IT8220151 A0 IT 8220151A0 IT 8220151 A IT8220151 A IT 8220151A IT 2015182 A IT2015182 A IT 2015182A IT 8220151 A0 IT8220151 A0 IT 8220151A0
Authority
IT
Italy
Prior art keywords
regeneration
procedure
preparation
polycrystalline silicon
hydrogen during
Prior art date
Application number
IT8220151A
Other languages
English (en)
Other versions
IT1190735B (it
Inventor
Tatarinov Jury Petrovich
Kupriyanov Ivan Andreevich
Ivanov Leonard Stepanovich
Bochkarev Ellin Petrovich
Shkotkin Dmitry Pavlovich
Graiver Boris Mikhailovich
Groza Lev Ivanovich
Filimonenkov Mikhai Matveevich
Lipkov Mikhail Maximovich
Semenov Alexandr Ivanovich
Original Assignee
Zaporozhie Urss Gni I P Instit
Ky Z Tsvetnykh Metallov
Zaporozhsky Titano Magnievy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zaporozhie Urss Gni I P Instit, Ky Z Tsvetnykh Metallov, Zaporozhsky Titano Magnievy filed Critical Zaporozhie Urss Gni I P Instit
Priority to IT20151/82A priority Critical patent/IT1190735B/it
Publication of IT8220151A0 publication Critical patent/IT8220151A0/it
Application granted granted Critical
Publication of IT1190735B publication Critical patent/IT1190735B/it

Links

IT20151/82A 1982-03-12 1982-03-12 Procedimento per la rigenarazione di clorosilani e idrogeno non reagiti nel corso della preparazione di silicio policristallino semiconduttore IT1190735B (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT20151/82A IT1190735B (it) 1982-03-12 1982-03-12 Procedimento per la rigenarazione di clorosilani e idrogeno non reagiti nel corso della preparazione di silicio policristallino semiconduttore

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT20151/82A IT1190735B (it) 1982-03-12 1982-03-12 Procedimento per la rigenarazione di clorosilani e idrogeno non reagiti nel corso della preparazione di silicio policristallino semiconduttore

Publications (2)

Publication Number Publication Date
IT8220151A0 true IT8220151A0 (it) 1982-03-12
IT1190735B IT1190735B (it) 1988-02-24

Family

ID=11164223

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20151/82A IT1190735B (it) 1982-03-12 1982-03-12 Procedimento per la rigenarazione di clorosilani e idrogeno non reagiti nel corso della preparazione di silicio policristallino semiconduttore

Country Status (1)

Country Link
IT (1) IT1190735B (it)

Also Published As

Publication number Publication date
IT1190735B (it) 1988-02-24

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