IT201700124320A1 - Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura - Google Patents

Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura

Info

Publication number
IT201700124320A1
IT201700124320A1 IT102017000124320A IT201700124320A IT201700124320A1 IT 201700124320 A1 IT201700124320 A1 IT 201700124320A1 IT 102017000124320 A IT102017000124320 A IT 102017000124320A IT 201700124320 A IT201700124320 A IT 201700124320A IT 201700124320 A1 IT201700124320 A1 IT 201700124320A1
Authority
IT
Italy
Prior art keywords
microelettromechanical
improved stability
temperature variations
stability compared
resonator system
Prior art date
Application number
IT102017000124320A
Other languages
English (en)
Inventor
Carlo Valzasina
Gabriele Gattere
Alessandro Tocchio
Giacomo Langfelder
Original Assignee
St Microelectronics Srl
Milano Politecnico
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, Milano Politecnico filed Critical St Microelectronics Srl
Priority to IT102017000124320A priority Critical patent/IT201700124320A1/it
Priority to US16/171,885 priority patent/US10862449B2/en
Priority to CN201811288309.XA priority patent/CN109728791B/zh
Priority to EP18203883.6A priority patent/EP3477852B1/en
Publication of IT201700124320A1 publication Critical patent/IT201700124320A1/it

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
    • H03L1/027—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature by using frequency conversion means which is variable with temperature, e.g. mixer, frequency divider, pulse add/substract logic circuit
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
    • H03L7/18—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop
    • H03L7/197—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division
    • H03L7/1974—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division for fractional frequency division
    • H03L7/1976—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop a time difference being used for locking the loop, the counter counting between numbers which are variable in time or the frequency divider dividing by a factor variable in time, e.g. for obtaining fractional frequency division for fractional frequency division using a phase accumulator for controlling the counter or frequency divider
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
IT102017000124320A 2017-10-31 2017-10-31 Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura IT201700124320A1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT102017000124320A IT201700124320A1 (it) 2017-10-31 2017-10-31 Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura
US16/171,885 US10862449B2 (en) 2017-10-31 2018-10-26 Microelectromechanical resonator system with improved stability with respect to temperature variations
CN201811288309.XA CN109728791B (zh) 2017-10-31 2018-10-31 相对于温度变化稳定性提高的微机电谐振器系统
EP18203883.6A EP3477852B1 (en) 2017-10-31 2018-10-31 Microelectromechanical resonator system with improved stability with respect to temperature variations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000124320A IT201700124320A1 (it) 2017-10-31 2017-10-31 Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura

Publications (1)

Publication Number Publication Date
IT201700124320A1 true IT201700124320A1 (it) 2019-05-01

Family

ID=61187747

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000124320A IT201700124320A1 (it) 2017-10-31 2017-10-31 Sistema di risonatore microelettromeccanico con migliorata stabilita' rispetto a variazioni di temperatura

Country Status (4)

Country Link
US (1) US10862449B2 (it)
EP (1) EP3477852B1 (it)
CN (1) CN109728791B (it)
IT (1) IT201700124320A1 (it)

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* Cited by examiner, † Cited by third party
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US10247621B1 (en) * 2015-09-13 2019-04-02 Sitime Corporation High resolution temperature sensor
WO2018148616A1 (en) 2017-02-11 2018-08-16 Mumec, Inc. Frequency-converting super-regenerative transceiver
CN113031248B (zh) * 2019-12-09 2022-11-29 觉芯电子(无锡)有限公司 一种控制微镜偏转的方法及装置
CN113358899B (zh) * 2021-04-26 2023-08-15 中国科学院空天信息创新研究院 加速度计及加速度计的温度自补偿方法
CN114384299B (zh) * 2022-01-14 2024-06-18 北京神导科技股份有限公司 一种差分型电路结构的电流采集转换方法
CN117097289B (zh) * 2023-10-19 2024-01-30 麦斯塔微电子(深圳)有限公司 微机电谐振器

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US20050285692A1 (en) * 2004-06-24 2005-12-29 Nokia Corporation Frequency synthesizer
US20070024158A1 (en) * 2003-05-15 2007-02-01 Claude Bourgeois Integrated resonators and time base incorporating said resonators
US20100289096A1 (en) * 2007-10-09 2010-11-18 Commissariat A L' Energie Atomique Et Aux Engn Alt Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
US20140285270A1 (en) * 2011-10-31 2014-09-25 Anharmonic B.V. Electronic Oscillation Circuit
US9494472B2 (en) * 2011-01-24 2016-11-15 Office National D'etudes Et De Recherches Aerospatiales (Onera) Device for measuring the temperature of a vibrating beam and application to the improvement of the precision of measurement of a vibrating-beam sensor

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US6995622B2 (en) * 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
US7446619B2 (en) * 2006-06-14 2008-11-04 Sitime Corporation Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
US7990229B2 (en) * 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
CN101482575B (zh) * 2009-02-23 2011-02-09 东南大学 一种悬臂梁结构的谐振式集成光波导加速度计
EP2512031B1 (en) * 2011-04-15 2015-10-07 Nxp B.V. MEMS resonator and method of controlling the same
CN102811022A (zh) * 2011-05-31 2012-12-05 Imec公司 烘箱控制mems振荡器装置
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US9318998B1 (en) * 2013-08-30 2016-04-19 Georgia Tech Research Corporation Acoustically-engineered multi-port piezoelectric-on-semiconductor resonators for accurate temperature sensing and reference signal generation

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US20070024158A1 (en) * 2003-05-15 2007-02-01 Claude Bourgeois Integrated resonators and time base incorporating said resonators
US20050285692A1 (en) * 2004-06-24 2005-12-29 Nokia Corporation Frequency synthesizer
US20100289096A1 (en) * 2007-10-09 2010-11-18 Commissariat A L' Energie Atomique Et Aux Engn Alt Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
US9494472B2 (en) * 2011-01-24 2016-11-15 Office National D'etudes Et De Recherches Aerospatiales (Onera) Device for measuring the temperature of a vibrating beam and application to the improvement of the precision of measurement of a vibrating-beam sensor
US20140285270A1 (en) * 2011-10-31 2014-09-25 Anharmonic B.V. Electronic Oscillation Circuit

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AZCONDO F J ET AL: "NEW DIGITAL COMPENSATION TECHNIQUE FOR THE DESIGN OF A MICROCOMPUTER COMPENSATED CRYSTAL OSCILLATOR", IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, IEEE SERVICE CENTER, PISCATAWAY, NJ, USA, vol. 42, no. 3, 30 June 1995 (1995-06-30), pages 307 - 315, XP000506392, ISSN: 0278-0046, DOI: 10.1109/41.382142 *
KAAJAKARI V ET AL: "Square-extensional mode single-crystal silicon micromechanical RF-resonator", TRANSDUCERS, SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, 12TH INN ATIONAL CONFERENCE ON, 2003, PISCATAWAY, NJ, USA,IEEE, 8 June 2003 (2003-06-08), pages 951 - 954vol.2, XP032377653, ISBN: 978-0-7803-7731-8, DOI: 10.1109/SENSOR.2003.1216924 *
M. KOSKENVUORI ET AL: "Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator", MEMS 2008, 31 January 2008 (2008-01-31), Tucson,AZ, USA, pages 78 - 81, XP055352914, ISBN: 978-1-4244-1793-3, DOI: 10.1109/MEMSYS.2008.4443597 *
SCHODOWSKI: "Resonator self-temperature-sensing using a dual-harmonic-mode crystal oscillator", 19890531; 19890531 - 19890602, 31 May 1989 (1989-05-31), pages 2 - 7, XP010084234 *

Also Published As

Publication number Publication date
US20190131952A1 (en) 2019-05-02
US10862449B2 (en) 2020-12-08
CN109728791B (zh) 2023-07-11
EP3477852A1 (en) 2019-05-01
CN109728791A (zh) 2019-05-07
EP3477852B1 (en) 2021-01-27

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