IT201600131865A1 - MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE - Google Patents

MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE

Info

Publication number
IT201600131865A1
IT201600131865A1 IT102016000131865A IT201600131865A IT201600131865A1 IT 201600131865 A1 IT201600131865 A1 IT 201600131865A1 IT 102016000131865 A IT102016000131865 A IT 102016000131865A IT 201600131865 A IT201600131865 A IT 201600131865A IT 201600131865 A1 IT201600131865 A1 IT 201600131865A1
Authority
IT
Italy
Prior art keywords
burial
electro
micro
mechanical device
device equipped
Prior art date
Application number
IT102016000131865A
Other languages
Italian (it)
Inventor
Sonia Costantini
Marta Carminati
Daniela Angela Luisa Gatti
Laura Maria Castoldi
Roberto Carminati
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102016000131865A priority Critical patent/IT201600131865A1/en
Priority to EP17172107.9A priority patent/EP3343266B1/en
Priority to US15/603,614 priority patent/US10197794B2/en
Priority to CN201720760087.1U priority patent/CN207390996U/en
Priority to CN201710500966.5A priority patent/CN108249387B/en
Publication of IT201600131865A1 publication Critical patent/IT201600131865A1/en
Priority to US16/225,881 priority patent/US10649202B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0083—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/00714—Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
IT102016000131865A 2016-12-28 2016-12-28 MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE IT201600131865A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102016000131865A IT201600131865A1 (en) 2016-12-28 2016-12-28 MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE
EP17172107.9A EP3343266B1 (en) 2016-12-28 2017-05-20 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
US15/603,614 US10197794B2 (en) 2016-12-28 2017-05-24 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof
CN201720760087.1U CN207390996U (en) 2016-12-28 2017-06-27 Micro-electromechanical device
CN201710500966.5A CN108249387B (en) 2016-12-28 2017-06-27 Micro-electromechanical device with movable structure and manufacturing process thereof
US16/225,881 US10649202B2 (en) 2016-12-28 2018-12-19 Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000131865A IT201600131865A1 (en) 2016-12-28 2016-12-28 MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE

Publications (1)

Publication Number Publication Date
IT201600131865A1 true IT201600131865A1 (en) 2018-06-28

Family

ID=58609913

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102016000131865A IT201600131865A1 (en) 2016-12-28 2016-12-28 MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE

Country Status (4)

Country Link
US (2) US10197794B2 (en)
EP (1) EP3343266B1 (en)
CN (2) CN207390996U (en)
IT (1) IT201600131865A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201600131865A1 (en) * 2016-12-28 2018-06-28 St Microelectronics Srl MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE
US10499021B2 (en) * 2017-04-11 2019-12-03 Microsoft Technology Licensing, Llc Foveated MEMS scanning display
IT201700091226A1 (en) * 2017-08-07 2019-02-07 St Microelectronics Srl MEMS DEVICE INCLUDING A MEMBRANE AND AN ACTUATOR TO CHECK THE BEND OF THE MEMBRANE AND COMPENSATE UNWANTED MEMBRANE DEFORMATIONS
EP3666727B1 (en) 2018-12-14 2024-10-02 STMicroelectronics S.r.l. Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
JP7386625B2 (en) * 2019-06-17 2023-11-27 スタンレー電気株式会社 Method for manufacturing an optical deflector and optical deflector
IT201900024469A1 (en) * 2019-12-18 2021-06-18 St Microelectronics Srl MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION, WITH IMPROVED STRUCTURE
IT201900025084A1 (en) * 2019-12-20 2021-06-20 St Microelectronics Srl MICROELECTROMECHANICAL DEVICE EQUIPPED WITH AN ADJUSTABLE STRUCTURE PROTECTED FROM IMPACTS
WO2021134676A1 (en) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Mems driver and imaging anti-jitter device
CN115210626B (en) * 2020-03-12 2024-04-16 三菱电机株式会社 Optical scanning device, distance measuring device, and method for manufacturing optical scanning device
DE102020114347B3 (en) * 2020-05-28 2021-10-28 Infineon Technologies Ag MEMS devices with spring element and comb drive and related manufacturing processes
US11693233B2 (en) * 2020-06-19 2023-07-04 Microsoft Technology Licensing, Llc Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror
EP4383691A1 (en) 2021-11-10 2024-06-12 Samsung Electronics Co., Ltd. Electronic device comprising adhesive member
CN115308899B (en) * 2022-08-29 2024-09-24 觉芯电子(无锡)有限公司 Electromagnetic driving micro-mirror device with high-density coil and preparation process
WO2024116520A1 (en) * 2022-11-30 2024-06-06 パナソニックＩｐマネジメント株式会社 Optical reflection element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014056211A (en) * 2012-09-14 2014-03-27 Seiko Epson Corp Actuator, optical scanner, image display device, and head-mounted display
US20140285871A1 (en) * 2013-03-22 2014-09-25 Abdul Jaleel K. Moidu Hidden hinge mems with temporary gimbal anchor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008012826B4 (en) * 2007-04-02 2012-11-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a three-dimensional micromechanical structure from two-dimensional elements and micromechanical component
US8456724B2 (en) * 2010-06-17 2013-06-04 Touch Micro-System Technology Corp. Biaxial scanning mirror for image forming apparatus
JP5949345B2 (en) * 2012-09-04 2016-07-06 セイコーエプソン株式会社 Actuator, optical scanner, image display device, and head mounted display
JP2014191008A (en) * 2013-03-26 2014-10-06 Seiko Epson Corp Actuator, optical scanner, and image display device
IT201600131865A1 (en) * 2016-12-28 2018-06-28 St Microelectronics Srl MICRO-ELECTRO-MECHANICAL DEVICE EQUIPPED WITH A MOBILE STRUCTURE, IN PARTICULAR BURIAL, AND ITS MANUFACTURING PROCEDURE

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014056211A (en) * 2012-09-14 2014-03-27 Seiko Epson Corp Actuator, optical scanner, image display device, and head-mounted display
US20140285871A1 (en) * 2013-03-22 2014-09-25 Abdul Jaleel K. Moidu Hidden hinge mems with temporary gimbal anchor

Also Published As

Publication number Publication date
EP3343266B1 (en) 2022-04-27
US10197794B2 (en) 2019-02-05
US20180180871A1 (en) 2018-06-28
US10649202B2 (en) 2020-05-12
US20190121122A1 (en) 2019-04-25
CN108249387B (en) 2023-04-11
CN108249387A (en) 2018-07-06
EP3343266A1 (en) 2018-07-04
CN207390996U (en) 2018-05-22

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