IT1404259B1 - Procedimento di realizzazione di nano-strutture cave - Google Patents

Procedimento di realizzazione di nano-strutture cave

Info

Publication number
IT1404259B1
IT1404259B1 ITTO2011A000066A ITTO20110066A IT1404259B1 IT 1404259 B1 IT1404259 B1 IT 1404259B1 IT TO2011A000066 A ITTO2011A000066 A IT TO2011A000066A IT TO20110066 A ITTO20110066 A IT TO20110066A IT 1404259 B1 IT1404259 B1 IT 1404259B1
Authority
IT
Italy
Prior art keywords
nano
realization
procedure
structure caves
caves
Prior art date
Application number
ITTO2011A000066A
Other languages
English (en)
Inventor
Fabrizio Enzo Di
Angelis Francesco De
Original Assignee
Fond Istituto Italiano Di Tecnologia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fond Istituto Italiano Di Tecnologia filed Critical Fond Istituto Italiano Di Tecnologia
Priority to ITTO2011A000066A priority Critical patent/IT1404259B1/it
Priority to US13/978,407 priority patent/US9067242B2/en
Priority to EP12706682.7A priority patent/EP2668132B1/en
Priority to PCT/IB2012/050366 priority patent/WO2012101595A1/en
Publication of ITTO20110066A1 publication Critical patent/ITTO20110066A1/it
Application granted granted Critical
Publication of IT1404259B1 publication Critical patent/IT1404259B1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/068—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using ionising radiations (gamma, X, electrons)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/40—Conductive probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Physical Vapour Deposition (AREA)
ITTO2011A000066A 2011-01-26 2011-01-26 Procedimento di realizzazione di nano-strutture cave IT1404259B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO2011A000066A IT1404259B1 (it) 2011-01-26 2011-01-26 Procedimento di realizzazione di nano-strutture cave
US13/978,407 US9067242B2 (en) 2011-01-26 2012-01-26 Methods for obtaining hollow nano-structures
EP12706682.7A EP2668132B1 (en) 2011-01-26 2012-01-26 Method for obtaining hollow nano-structures
PCT/IB2012/050366 WO2012101595A1 (en) 2011-01-26 2012-01-26 Method for obtaining hollow nano-structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2011A000066A IT1404259B1 (it) 2011-01-26 2011-01-26 Procedimento di realizzazione di nano-strutture cave

Publications (2)

Publication Number Publication Date
ITTO20110066A1 ITTO20110066A1 (it) 2012-07-27
IT1404259B1 true IT1404259B1 (it) 2013-11-15

Family

ID=43975645

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2011A000066A IT1404259B1 (it) 2011-01-26 2011-01-26 Procedimento di realizzazione di nano-strutture cave

Country Status (4)

Country Link
US (1) US9067242B2 (it)
EP (1) EP2668132B1 (it)
IT (1) IT1404259B1 (it)
WO (1) WO2012101595A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20130552A1 (it) * 2013-07-02 2015-01-03 Fond Istituto Italiano Di Tecnologia Procedimento perfezionato per la fabbricazione di nanostrutture tridimensionali cave

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919749A (en) * 1989-05-26 1990-04-24 Nanostructures, Inc. Method for making high resolution silicon shadow masks
KR100311880B1 (ko) * 1996-11-11 2001-12-20 미다라이 후지오 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드
JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
KR100436292B1 (ko) * 2001-11-28 2004-06-16 한국전자통신연구원 광정보 기록/재생 헤드 및 그 제조 방법
US6886395B2 (en) * 2003-01-16 2005-05-03 Veeco Instruments Inc. Method of fabricating a surface probing device and probing device produced thereby
JP2009061664A (ja) * 2007-09-06 2009-03-26 Canon Inc インクジェットヘッド用基板の製造方法

Also Published As

Publication number Publication date
US9067242B2 (en) 2015-06-30
EP2668132B1 (en) 2019-03-06
US20130284696A1 (en) 2013-10-31
EP2668132A1 (en) 2013-12-04
ITTO20110066A1 (it) 2012-07-27
WO2012101595A1 (en) 2012-08-02

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