IT1404259B1 - Procedimento di realizzazione di nano-strutture cave - Google Patents
Procedimento di realizzazione di nano-strutture caveInfo
- Publication number
- IT1404259B1 IT1404259B1 ITTO2011A000066A ITTO20110066A IT1404259B1 IT 1404259 B1 IT1404259 B1 IT 1404259B1 IT TO2011A000066 A ITTO2011A000066 A IT TO2011A000066A IT TO20110066 A ITTO20110066 A IT TO20110066A IT 1404259 B1 IT1404259 B1 IT 1404259B1
- Authority
- IT
- Italy
- Prior art keywords
- nano
- realization
- procedure
- structure caves
- caves
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/068—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using ionising radiations (gamma, X, electrons)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
- G01Q60/40—Conductive probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Micromachines (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO2011A000066A IT1404259B1 (it) | 2011-01-26 | 2011-01-26 | Procedimento di realizzazione di nano-strutture cave |
US13/978,407 US9067242B2 (en) | 2011-01-26 | 2012-01-26 | Methods for obtaining hollow nano-structures |
EP12706682.7A EP2668132B1 (en) | 2011-01-26 | 2012-01-26 | Method for obtaining hollow nano-structures |
PCT/IB2012/050366 WO2012101595A1 (en) | 2011-01-26 | 2012-01-26 | Method for obtaining hollow nano-structures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO2011A000066A IT1404259B1 (it) | 2011-01-26 | 2011-01-26 | Procedimento di realizzazione di nano-strutture cave |
Publications (2)
Publication Number | Publication Date |
---|---|
ITTO20110066A1 ITTO20110066A1 (it) | 2012-07-27 |
IT1404259B1 true IT1404259B1 (it) | 2013-11-15 |
Family
ID=43975645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITTO2011A000066A IT1404259B1 (it) | 2011-01-26 | 2011-01-26 | Procedimento di realizzazione di nano-strutture cave |
Country Status (4)
Country | Link |
---|---|
US (1) | US9067242B2 (it) |
EP (1) | EP2668132B1 (it) |
IT (1) | IT1404259B1 (it) |
WO (1) | WO2012101595A1 (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20130552A1 (it) * | 2013-07-02 | 2015-01-03 | Fond Istituto Italiano Di Tecnologia | Procedimento perfezionato per la fabbricazione di nanostrutture tridimensionali cave |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4919749A (en) * | 1989-05-26 | 1990-04-24 | Nanostructures, Inc. | Method for making high resolution silicon shadow masks |
KR100311880B1 (ko) * | 1996-11-11 | 2001-12-20 | 미다라이 후지오 | 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드 |
JPH11166935A (ja) * | 1997-09-25 | 1999-06-22 | Canon Inc | 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板 |
KR100436292B1 (ko) * | 2001-11-28 | 2004-06-16 | 한국전자통신연구원 | 광정보 기록/재생 헤드 및 그 제조 방법 |
US6886395B2 (en) * | 2003-01-16 | 2005-05-03 | Veeco Instruments Inc. | Method of fabricating a surface probing device and probing device produced thereby |
JP2009061664A (ja) * | 2007-09-06 | 2009-03-26 | Canon Inc | インクジェットヘッド用基板の製造方法 |
-
2011
- 2011-01-26 IT ITTO2011A000066A patent/IT1404259B1/it active
-
2012
- 2012-01-26 WO PCT/IB2012/050366 patent/WO2012101595A1/en active Application Filing
- 2012-01-26 EP EP12706682.7A patent/EP2668132B1/en active Active
- 2012-01-26 US US13/978,407 patent/US9067242B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US9067242B2 (en) | 2015-06-30 |
EP2668132B1 (en) | 2019-03-06 |
US20130284696A1 (en) | 2013-10-31 |
EP2668132A1 (en) | 2013-12-04 |
ITTO20110066A1 (it) | 2012-07-27 |
WO2012101595A1 (en) | 2012-08-02 |
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