IT1399182B1 - Metodo e apparecchiatura per il trasporto di fasci di elettroni - Google Patents

Metodo e apparecchiatura per il trasporto di fasci di elettroni

Info

Publication number
IT1399182B1
IT1399182B1 ITMI2010A000120A ITMI20100120A IT1399182B1 IT 1399182 B1 IT1399182 B1 IT 1399182B1 IT MI2010A000120 A ITMI2010A000120 A IT MI2010A000120A IT MI20100120 A ITMI20100120 A IT MI20100120A IT 1399182 B1 IT1399182 B1 IT 1399182B1
Authority
IT
Italy
Prior art keywords
transport
equipment
electronic bands
bands
electronic
Prior art date
Application number
ITMI2010A000120A
Other languages
English (en)
Inventor
Stefano Rampino
Giorgio Dilecce
Roberto Verucchi
Original Assignee
Pattini
Armani
Verucchi
Dilecce
Salviati
Gombia
Gilioli
Marigo
Rampino
Bissoli
Nasi
Mazzer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pattini, Armani, Verucchi, Dilecce, Salviati, Gombia, Gilioli, Marigo, Rampino, Bissoli, Nasi, Mazzer filed Critical Pattini
Priority to ITMI2010A000120A priority Critical patent/IT1399182B1/it
Publication of ITMI20100120A1 publication Critical patent/ITMI20100120A1/it
Application granted granted Critical
Publication of IT1399182B1 publication Critical patent/IT1399182B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
ITMI2010A000120A 2010-01-28 2010-01-28 Metodo e apparecchiatura per il trasporto di fasci di elettroni IT1399182B1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITMI2010A000120A IT1399182B1 (it) 2010-01-28 2010-01-28 Metodo e apparecchiatura per il trasporto di fasci di elettroni

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2010A000120A IT1399182B1 (it) 2010-01-28 2010-01-28 Metodo e apparecchiatura per il trasporto di fasci di elettroni

Publications (2)

Publication Number Publication Date
ITMI20100120A1 ITMI20100120A1 (it) 2011-07-29
IT1399182B1 true IT1399182B1 (it) 2013-04-11

Family

ID=42237431

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A000120A IT1399182B1 (it) 2010-01-28 2010-01-28 Metodo e apparecchiatura per il trasporto di fasci di elettroni

Country Status (1)

Country Link
IT (1) IT1399182B1 (it)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899556A (en) * 1952-10-17 1959-08-11 Apparatus for the treatment of substances
GB1049057A (en) * 1964-06-11 1966-11-23 Sciaky David Electron beam welding out of vacuum
JPS5656791A (en) * 1979-10-17 1981-05-18 Toshiba Corp Atmospheric electronic beam welding equipment
US4931700A (en) * 1988-09-02 1990-06-05 Reed Jay L Electron beam gun
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator
AU737387B2 (en) * 1997-11-24 2001-08-16 Gerasimos Daniel Danilatos Differential pumping via core of annular supersonic jet
RU2200058C1 (ru) * 2002-02-12 2003-03-10 Открытое акционерное общество "ТВЭЛ" Способ проведения гомогенных и гетерогенных химических реакций с использованием плазмы
US6998627B1 (en) * 2004-10-12 2006-02-14 Steris Inc. Channel for transport of electron beam from accelerator to irradiated product

Also Published As

Publication number Publication date
ITMI20100120A1 (it) 2011-07-29

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