IT1395106B1 - ACCELERATION SENSOR - Google Patents

ACCELERATION SENSOR

Info

Publication number
IT1395106B1
IT1395106B1 ITMI2009A001329A ITMI20091329A IT1395106B1 IT 1395106 B1 IT1395106 B1 IT 1395106B1 IT MI2009A001329 A ITMI2009A001329 A IT MI2009A001329A IT MI20091329 A ITMI20091329 A IT MI20091329A IT 1395106 B1 IT1395106 B1 IT 1395106B1
Authority
IT
Italy
Prior art keywords
acceleration sensor
acceleration
sensor
Prior art date
Application number
ITMI2009A001329A
Other languages
Italian (it)
Inventor
Dietrich Schubert
Lars Tebje
Johannes Classen
Arnd Kaelberer
Patrick Wellner
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091329A1 publication Critical patent/ITMI20091329A1/en
Application granted granted Critical
Publication of IT1395106B1 publication Critical patent/IT1395106B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
ITMI2009A001329A 2008-07-30 2009-07-27 ACCELERATION SENSOR IT1395106B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008040872A DE102008040872A1 (en) 2008-07-30 2008-07-30 Capacitive acceleration sensor for detecting acceleration in z-direction at substrate plane of luffing structure, has substrate fingers connected with substrate, where one of fingers has conductive electrodes insulated from each other

Publications (2)

Publication Number Publication Date
ITMI20091329A1 ITMI20091329A1 (en) 2010-01-31
IT1395106B1 true IT1395106B1 (en) 2012-09-05

Family

ID=41461742

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001329A IT1395106B1 (en) 2008-07-30 2009-07-27 ACCELERATION SENSOR

Country Status (2)

Country Link
DE (1) DE102008040872A1 (en)
IT (1) IT1395106B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6631108B2 (en) * 2015-09-15 2020-01-15 セイコーエプソン株式会社 Physical quantity sensors, sensor devices, electronic devices and moving objects

Also Published As

Publication number Publication date
ITMI20091329A1 (en) 2010-01-31
DE102008040872A1 (en) 2010-02-04

Similar Documents

Publication Publication Date Title
IT1391187B1 (en) PRESSURE SENSOR DEVICE
DK2264676T3 (en) Sensor
IT1394791B1 (en) PRESSURE SENSOR
IT1397626B1 (en) SENSOR SYSTEM
DE112009004269A5 (en) Capacitive sensor system
IT1400085B1 (en) SENSOR MODULE
IT1395105B1 (en) ACCELERATION THREE-AXIS SENSOR
DE502007005051D1 (en) ACCELERATION SENSOR
FI20095903A0 (en) Micromechanical angle sensor
BRPI0815935A2 (en) position sensor
DE602008000899D1 (en) force sensor
IT1395163B1 (en) ACCELERATION THREE-AXIS SENSOR
IT1400755B1 (en) OPTOELECTRONIC SENSOR
IT1402564B1 (en) PROCEDURE FOR ADJUSTING AN ACCELERATION SENSOR AND ACCELERATION SENSOR
DE112008001742A5 (en) sensor arrangement
BR112013013793A2 (en) pathogen sensor
IT1397182B1 (en) ROTATION FREQUENCY SENSOR
ITMI20071414A1 (en) OPTOELECTRONIC SENSOR
DE112008000345A5 (en) sensor arrangement
EP2131202A4 (en) Acceleration sensor
BRPI0915610A2 (en) position sensor
EP2352037A4 (en) Acceleration sensor
DE112008003283A5 (en) linear sensor
DK2136192T3 (en) Sensor fixing arrangement
IT1397202B1 (en) ACCELERATION SENSOR