IT1391913B1 - METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT - Google Patents

METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT

Info

Publication number
IT1391913B1
IT1391913B1 ITBO2008A000706A ITBO20080706A IT1391913B1 IT 1391913 B1 IT1391913 B1 IT 1391913B1 IT BO2008A000706 A ITBO2008A000706 A IT BO2008A000706A IT BO20080706 A ITBO20080706 A IT BO20080706A IT 1391913 B1 IT1391913 B1 IT 1391913B1
Authority
IT
Italy
Prior art keywords
interferometry
thickness
equipment
optical measurement
measurement
Prior art date
Application number
ITBO2008A000706A
Other languages
Italian (it)
Inventor
Leonardo Gwin Roberto Phillips
Original Assignee
Marposs Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marposs Spa filed Critical Marposs Spa
Priority to ITBO2008A000706A priority Critical patent/IT1391913B1/en
Publication of ITBO20080706A1 publication Critical patent/ITBO20080706A1/en
Application granted granted Critical
Publication of IT1391913B1 publication Critical patent/IT1391913B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
ITBO2008A000706A 2008-11-24 2008-11-24 METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT IT1391913B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITBO2008A000706A IT1391913B1 (en) 2008-11-24 2008-11-24 METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITBO2008A000706A IT1391913B1 (en) 2008-11-24 2008-11-24 METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT

Publications (2)

Publication Number Publication Date
ITBO20080706A1 ITBO20080706A1 (en) 2010-05-25
IT1391913B1 true IT1391913B1 (en) 2012-02-02

Family

ID=41260484

Family Applications (1)

Application Number Title Priority Date Filing Date
ITBO2008A000706A IT1391913B1 (en) 2008-11-24 2008-11-24 METHOD AND EQUIPMENT FOR THE OPTICAL MEASUREMENT BY INTERFEROMETRY OF THE THICKNESS OF AN OBJECT

Country Status (1)

Country Link
IT (1) IT1391913B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7821655B2 (en) * 2004-02-09 2010-10-26 Axcelis Technologies, Inc. In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction
JP4520846B2 (en) * 2004-12-28 2010-08-11 日本分光株式会社 Near-field film thickness measurement system
ES2749378T3 (en) * 2005-05-19 2020-03-20 Zygo Corp Low coherence interferometry signal analysis for thin film structures

Also Published As

Publication number Publication date
ITBO20080706A1 (en) 2010-05-25

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