IT1319845B1 - Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento. - Google Patents

Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento.

Info

Publication number
IT1319845B1
IT1319845B1 ITTO20000152A IT1319845B1 IT 1319845 B1 IT1319845 B1 IT 1319845B1 IT TO20000152 A ITTO20000152 A IT TO20000152A IT 1319845 B1 IT1319845 B1 IT 1319845B1
Authority
IT
Italy
Prior art keywords
shutters
die
filling factor
high filling
electrostatic micro
Prior art date
Application number
Other languages
English (en)
Inventor
Marco Pizzi
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Priority to ITTO20000152 priority Critical patent/IT1319845B1/it
Priority to EP20010830085 priority patent/EP1126305B1/en
Priority to DE2001600197 priority patent/DE60100197T2/de
Priority to ES01830085T priority patent/ES2195986T3/es
Publication of ITTO20000152A1 publication Critical patent/ITTO20000152A1/it
Application granted granted Critical
Publication of IT1319845B1 publication Critical patent/IT1319845B1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
ITTO20000152 2000-02-16 2000-02-16 Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento. IT1319845B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO20000152 IT1319845B1 (it) 2000-02-16 2000-02-16 Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento.
EP20010830085 EP1126305B1 (en) 2000-02-16 2001-02-09 Electrostatic microshutter matrix having a high fill factor
DE2001600197 DE60100197T2 (de) 2000-02-16 2001-02-09 Elektrostatische Mikroverschluss-Matrix mit hohem Füllfaktor
ES01830085T ES2195986T3 (es) 2000-02-16 2001-02-09 Matriz de microobturadores electrostaticos con elevado factor de cobertura.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO20000152 IT1319845B1 (it) 2000-02-16 2000-02-16 Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento.

Publications (2)

Publication Number Publication Date
ITTO20000152A1 ITTO20000152A1 (it) 2001-08-16
IT1319845B1 true IT1319845B1 (it) 2003-11-03

Family

ID=11457436

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO20000152 IT1319845B1 (it) 2000-02-16 2000-02-16 Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento.

Country Status (4)

Country Link
EP (1) EP1126305B1 (it)
DE (1) DE60100197T2 (it)
ES (1) ES2195986T3 (it)
IT (1) IT1319845B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10215658A1 (de) * 2002-04-09 2003-10-30 Astrium Gmbh Optische Blenden-Anordnung mit Blenden-Array und selektiver Ansteuerung von Blenden-Elementen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3746785A (en) * 1971-11-26 1973-07-17 Bendix Corp Deflectable membrane optical modulator
EP0246547A3 (de) * 1986-05-22 1990-06-13 Siemens Aktiengesellschaft Anordnung zur optischen Bildverarbeitung
US5781331A (en) * 1997-01-24 1998-07-14 Roxburgh Ltd. Optical microshutter array

Also Published As

Publication number Publication date
EP1126305B1 (en) 2003-04-23
EP1126305A2 (en) 2001-08-22
EP1126305A3 (en) 2002-01-23
ITTO20000152A1 (it) 2001-08-16
DE60100197T2 (de) 2004-05-19
DE60100197D1 (de) 2003-05-28
ES2195986T3 (es) 2003-12-16

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