IT1265684B1 - Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive - Google Patents

Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive

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Publication number
IT1265684B1
IT1265684B1 IT92MI001396A ITMI921396A IT1265684B1 IT 1265684 B1 IT1265684 B1 IT 1265684B1 IT 92MI001396 A IT92MI001396 A IT 92MI001396A IT MI921396 A ITMI921396 A IT MI921396A IT 1265684 B1 IT1265684 B1 IT 1265684B1
Authority
IT
Italy
Prior art keywords
developer
control device
positive
lamp
negative
Prior art date
Application number
IT92MI001396A
Other languages
English (en)
Inventor
Roberto Carbonini
Original Assignee
Lastra Attrezzature S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lastra Attrezzature S R L filed Critical Lastra Attrezzature S R L
Priority to IT92MI001396A priority Critical patent/IT1265684B1/it
Publication of ITMI921396A0 publication Critical patent/ITMI921396A0/it
Publication of ITMI921396A1 publication Critical patent/ITMI921396A1/it
Application granted granted Critical
Publication of IT1265684B1 publication Critical patent/IT1265684B1/it

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  • Discharge Lamp (AREA)

Abstract

L'invenzione riguarda un dispositivo di controllo per un espositore per lastre fotolitografiche negative e positive comprendente mezzi di regolazione (18, 22, 26, 39, 41, 43, 44, 49) operativamente connessi ad una lampada a scarica in gas (1) per mantenere sostanzialmente costante nel tempo una corrente di alimentazione di detta lampada (1), in modo da conservare sostanzialmente invariata la sua intensità luminosa; preferibilmente il sistema comprende anche ulteriori mezzi di regolazione (18, 24, 28, 30) operativamente, connessi ad un ventilatore (2) per mantenere ad un determinato valore la temperatura di detta lampada (1). (Fig. 1)
IT92MI001396A 1992-06-05 1992-06-05 Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive IT1265684B1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT92MI001396A IT1265684B1 (it) 1992-06-05 1992-06-05 Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT92MI001396A IT1265684B1 (it) 1992-06-05 1992-06-05 Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive

Publications (3)

Publication Number Publication Date
ITMI921396A0 ITMI921396A0 (it) 1992-06-05
ITMI921396A1 ITMI921396A1 (it) 1993-12-06
IT1265684B1 true IT1265684B1 (it) 1996-11-29

Family

ID=11363461

Family Applications (1)

Application Number Title Priority Date Filing Date
IT92MI001396A IT1265684B1 (it) 1992-06-05 1992-06-05 Dispositivo di controllo di un espositore per lastre fotolitografiche negative e positive

Country Status (1)

Country Link
IT (1) IT1265684B1 (it)

Also Published As

Publication number Publication date
ITMI921396A0 (it) 1992-06-05
ITMI921396A1 (it) 1993-12-06

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Legal Events

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0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970625