IT1237644B - High purity gas delivery assembly - Google Patents

High purity gas delivery assembly

Info

Publication number
IT1237644B
IT1237644B IT22154A IT2215489A IT1237644B IT 1237644 B IT1237644 B IT 1237644B IT 22154 A IT22154 A IT 22154A IT 2215489 A IT2215489 A IT 2215489A IT 1237644 B IT1237644 B IT 1237644B
Authority
IT
Italy
Prior art keywords
high purity
purity gas
gas flow
gas delivery
delivery assembly
Prior art date
Application number
IT22154A
Other languages
Italian (it)
Other versions
IT8922154A0 (en
IT8922154A1 (en
Inventor
Porta Paolo Della
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT22154A priority Critical patent/IT1237644B/en
Publication of IT8922154A0 publication Critical patent/IT8922154A0/en
Priority to US07/451,183 priority patent/US4991619A/en
Priority to CA 2006331 priority patent/CA2006331A1/en
Priority to JP33883489A priority patent/JP2709858B2/en
Priority to EP19890830572 priority patent/EP0377418B1/en
Priority to DE89830572T priority patent/DE68911118T2/en
Publication of IT8922154A1 publication Critical patent/IT8922154A1/en
Application granted granted Critical
Publication of IT1237644B publication Critical patent/IT1237644B/en

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Glass Compositions (AREA)

Abstract

The high purity gas delivery control has a body (100) with an inlet port (104) and an outlet port (106) for high purity gas flow. There is a gas flow interruption device translation channel (108) and a seat seal receiving surface (110). This latter is located at the intersection between the inlet ports and the translation channel. Between the inlet and outlet ports is a gas flow interruption device (114) which controls the delivery of high purity gas. It has a bellows assembly (116) wiht a translation device (132) and a gas flow sealing assembly (136).
IT22154A 1989-01-04 1989-10-27 High purity gas delivery assembly IT1237644B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT22154A IT1237644B (en) 1989-10-27 1989-10-27 High purity gas delivery assembly
US07/451,183 US4991619A (en) 1989-01-04 1989-12-15 High purity gas delivery control assembly
CA 2006331 CA2006331A1 (en) 1989-01-04 1989-12-21 High purity gas delivery assembly
JP33883489A JP2709858B2 (en) 1989-01-04 1989-12-28 High purity gas delivery assembly
EP19890830572 EP0377418B1 (en) 1989-01-04 1989-12-29 High purity gas delivery assembly
DE89830572T DE68911118T2 (en) 1989-01-04 1989-12-29 Device for dispensing high-purity gases.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT22154A IT1237644B (en) 1989-10-27 1989-10-27 High purity gas delivery assembly

Publications (3)

Publication Number Publication Date
IT8922154A0 IT8922154A0 (en) 1989-10-27
IT8922154A1 IT8922154A1 (en) 1991-04-27
IT1237644B true IT1237644B (en) 1993-06-12

Family

ID=11192304

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22154A IT1237644B (en) 1989-01-04 1989-10-27 High purity gas delivery assembly

Country Status (1)

Country Link
IT (1) IT1237644B (en)

Also Published As

Publication number Publication date
IT8922154A0 (en) 1989-10-27
IT8922154A1 (en) 1991-04-27

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Legal Events

Date Code Title Description
0001 Granted