IT1228263B - Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione - Google Patents

Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione

Info

Publication number
IT1228263B
IT1228263B IT8721246A IT2124687A IT1228263B IT 1228263 B IT1228263 B IT 1228263B IT 8721246 A IT8721246 A IT 8721246A IT 2124687 A IT2124687 A IT 2124687A IT 1228263 B IT1228263 B IT 1228263B
Authority
IT
Italy
Prior art keywords
superconductors
evaporation
production
films deposited
perfected method
Prior art date
Application number
IT8721246A
Other languages
English (en)
Other versions
IT8721246A0 (it
Inventor
Claudio Boffito
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT8721246A priority Critical patent/IT1228263B/it
Publication of IT8721246A0 publication Critical patent/IT8721246A0/it
Priority to JP63165183A priority patent/JP2665771B2/ja
Priority to DE88830295T priority patent/DE3881589T2/de
Priority to EP88830295A priority patent/EP0298933B1/en
Application granted granted Critical
Publication of IT1228263B publication Critical patent/IT1228263B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4504—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0548—Processes for depositing or forming copper oxide superconductor layers by deposition and subsequent treatment, e.g. oxidation of pre-deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
IT8721246A 1987-07-10 1987-07-10 Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione IT1228263B (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IT8721246A IT1228263B (it) 1987-07-10 1987-07-10 Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione
JP63165183A JP2665771B2 (ja) 1987-07-10 1988-07-04 超電導体の作製のための改善方法
DE88830295T DE3881589T2 (de) 1987-07-10 1988-07-11 Verfahren zur Herstellung supraleitender Kupferoxid-Schichten.
EP88830295A EP0298933B1 (en) 1987-07-10 1988-07-11 Method for the manufacture of copper oxide superconducting films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8721246A IT1228263B (it) 1987-07-10 1987-07-10 Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione

Publications (2)

Publication Number Publication Date
IT8721246A0 IT8721246A0 (it) 1987-07-10
IT1228263B true IT1228263B (it) 1991-06-05

Family

ID=11178974

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8721246A IT1228263B (it) 1987-07-10 1987-07-10 Metodo perfezionato per la produzione di superconduttori sotto forma di pellicole depositate per evaporazione

Country Status (4)

Country Link
EP (1) EP0298933B1 (it)
JP (1) JP2665771B2 (it)
DE (1) DE3881589T2 (it)
IT (1) IT1228263B (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5132280A (en) * 1987-09-25 1992-07-21 At&T Bell Laboratories Method of producing a superconductive oxide layer on a substrate
JP2923372B2 (ja) * 1991-03-27 1999-07-26 財団法人国際超電導産業技術研究センター 酸化物超電導体膜の製造方法
US5480990A (en) * 1991-12-10 1996-01-02 The Dow Chemical Company Bicyclopolyazamacrocyclocarboxylic acid complexes for use as contrast agents

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288944A (ja) * 1987-05-22 1988-11-25 Hitachi Ltd 高温超電導体の作製方法

Also Published As

Publication number Publication date
JPH01103920A (ja) 1989-04-21
DE3881589D1 (de) 1993-07-15
DE3881589T2 (de) 1993-12-02
JP2665771B2 (ja) 1997-10-22
EP0298933A3 (en) 1990-01-31
EP0298933A2 (en) 1989-01-11
IT8721246A0 (it) 1987-07-10
EP0298933B1 (en) 1993-06-09

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970627