IT1203839B - PROCEDURE FOR MAKING AN OVEN COMPONENT - Google Patents
PROCEDURE FOR MAKING AN OVEN COMPONENTInfo
- Publication number
- IT1203839B IT1203839B IT19769/87A IT1976987A IT1203839B IT 1203839 B IT1203839 B IT 1203839B IT 19769/87 A IT19769/87 A IT 19769/87A IT 1976987 A IT1976987 A IT 1976987A IT 1203839 B IT1203839 B IT 1203839B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- making
- oven component
- oven
- component
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61178800A JPS6335452A (en) | 1986-07-31 | 1986-07-31 | Manufacture of structural member for semiconductor diffusion furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8719769A0 IT8719769A0 (en) | 1987-03-19 |
IT1203839B true IT1203839B (en) | 1989-02-23 |
Family
ID=16054866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT19769/87A IT1203839B (en) | 1986-07-31 | 1987-03-19 | PROCEDURE FOR MAKING AN OVEN COMPONENT |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS6335452A (en) |
IT (1) | IT1203839B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01282153A (en) * | 1988-05-06 | 1989-11-14 | Shin Etsu Chem Co Ltd | Silicon carbide-based reaction tube |
JPH01282152A (en) * | 1988-05-06 | 1989-11-14 | Shin Etsu Chem Co Ltd | Silicon carbide-based reaction tube |
JPH0382117A (en) * | 1989-08-25 | 1991-04-08 | Toshiba Ceramics Co Ltd | Manufacture of jig for semiconductor wafer treatment |
JP3642446B2 (en) * | 1996-08-01 | 2005-04-27 | 東芝セラミックス株式会社 | Semiconductor wafer processing tool |
US6673198B1 (en) | 1999-12-22 | 2004-01-06 | Lam Research Corporation | Semiconductor processing equipment having improved process drift control |
EP1184355B1 (en) | 2000-02-15 | 2006-12-13 | Toshiba Ceramics Co., Ltd. | METHOD FOR MANUFACTURING Si-SiC MEMBER FOR SEMICONDUCTOR HEAT TREATMENT |
US6890861B1 (en) | 2000-06-30 | 2005-05-10 | Lam Research Corporation | Semiconductor processing equipment having improved particle performance |
US6506254B1 (en) | 2000-06-30 | 2003-01-14 | Lam Research Corporation | Semiconductor processing equipment having improved particle performance |
-
1986
- 1986-07-31 JP JP61178800A patent/JPS6335452A/en active Granted
-
1987
- 1987-03-19 IT IT19769/87A patent/IT1203839B/en active
Also Published As
Publication number | Publication date |
---|---|
JPH0310592B2 (en) | 1991-02-14 |
IT8719769A0 (en) | 1987-03-19 |
JPS6335452A (en) | 1988-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970329 |