IT1128201B - Interferometro ottico - Google Patents

Interferometro ottico

Info

Publication number
IT1128201B
IT1128201B IT67026/80A IT6702680A IT1128201B IT 1128201 B IT1128201 B IT 1128201B IT 67026/80 A IT67026/80 A IT 67026/80A IT 6702680 A IT6702680 A IT 6702680A IT 1128201 B IT1128201 B IT 1128201B
Authority
IT
Italy
Prior art keywords
optical interferometer
interferometer
optical
Prior art date
Application number
IT67026/80A
Other languages
English (en)
Other versions
IT8067026A0 (it
Inventor
Herbert Morrison Runciman
Original Assignee
Barr & Stroud Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Barr & Stroud Ltd filed Critical Barr & Stroud Ltd
Publication of IT8067026A0 publication Critical patent/IT8067026A0/it
Application granted granted Critical
Publication of IT1128201B publication Critical patent/IT1128201B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IT67026/80A 1979-01-27 1980-01-10 Interferometro ottico IT1128201B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB7902945 1979-01-27

Publications (2)

Publication Number Publication Date
IT8067026A0 IT8067026A0 (it) 1980-01-10
IT1128201B true IT1128201B (it) 1986-05-28

Family

ID=10502776

Family Applications (1)

Application Number Title Priority Date Filing Date
IT67026/80A IT1128201B (it) 1979-01-27 1980-01-10 Interferometro ottico

Country Status (5)

Country Link
DE (1) DE3001851A1 (it)
FR (1) FR2447537A1 (it)
IT (1) IT1128201B (it)
NL (1) NL8000498A (it)
SE (1) SE8000210L (it)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA994547A (en) * 1974-07-22 1976-08-10 National Research Council Of Canada Optical system for angle measurement by interferometry
US4105335A (en) * 1975-06-28 1978-08-08 Canon Kabushiki Kaisha Interferometric optical phase discrimination apparatus
US4127781A (en) * 1977-06-22 1978-11-28 Hughes Aircraft Company Scan mirror position determining system

Also Published As

Publication number Publication date
NL8000498A (nl) 1980-07-29
DE3001851A1 (de) 1980-08-07
IT8067026A0 (it) 1980-01-10
SE8000210L (sv) 1980-07-28
FR2447537A1 (fr) 1980-08-22

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