IT1075879B - PROCEDURE AND DEVICE FOR THE OPERATION OF A TITANIUM EVAPORATING PUMP - Google Patents

PROCEDURE AND DEVICE FOR THE OPERATION OF A TITANIUM EVAPORATING PUMP

Info

Publication number
IT1075879B
IT1075879B IT2892376A IT2892376A IT1075879B IT 1075879 B IT1075879 B IT 1075879B IT 2892376 A IT2892376 A IT 2892376A IT 2892376 A IT2892376 A IT 2892376A IT 1075879 B IT1075879 B IT 1075879B
Authority
IT
Italy
Prior art keywords
procedure
pump
titanium
titanium evaporating
evaporating pump
Prior art date
Application number
IT2892376A
Other languages
Italian (it)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Application granted granted Critical
Publication of IT1075879B publication Critical patent/IT1075879B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IT2892376A 1975-10-29 1976-10-29 PROCEDURE AND DEVICE FOR THE OPERATION OF A TITANIUM EVAPORATING PUMP IT1075879B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752548302 DE2548302A1 (en) 1975-10-29 1975-10-29 METHOD AND DEVICE FOR OPERATING A TITANIUM EVAPORATOR PUMP

Publications (1)

Publication Number Publication Date
IT1075879B true IT1075879B (en) 1985-04-22

Family

ID=5960313

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2892376A IT1075879B (en) 1975-10-29 1976-10-29 PROCEDURE AND DEVICE FOR THE OPERATION OF A TITANIUM EVAPORATING PUMP

Country Status (4)

Country Link
DE (1) DE2548302A1 (en)
FR (1) FR2330141A1 (en)
GB (1) GB1522048A (en)
IT (1) IT1075879B (en)

Also Published As

Publication number Publication date
FR2330141A1 (en) 1977-05-27
GB1522048A (en) 1978-08-23
DE2548302A1 (en) 1977-05-05
FR2330141B3 (en) 1979-07-13

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