IT1061545B - Metodo di spruzzatura catodica per la fabbricazione di strutture attaccate - Google Patents
Metodo di spruzzatura catodica per la fabbricazione di strutture attaccateInfo
- Publication number
- IT1061545B IT1061545B IT24168/76A IT2416876A IT1061545B IT 1061545 B IT1061545 B IT 1061545B IT 24168/76 A IT24168/76 A IT 24168/76A IT 2416876 A IT2416876 A IT 2416876A IT 1061545 B IT1061545 B IT 1061545B
- Authority
- IT
- Italy
- Prior art keywords
- manufacture
- spraying method
- attached structures
- cathodic spraying
- cathodic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32131—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by physical means only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2526382A DE2526382C3 (de) | 1975-06-13 | 1975-06-13 | Kathodenzerstäubungsverf ahren zur Herstellung geätzter Strukturen |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1061545B true IT1061545B (it) | 1983-04-30 |
Family
ID=5948984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT24168/76A IT1061545B (it) | 1975-06-13 | 1976-06-10 | Metodo di spruzzatura catodica per la fabbricazione di strutture attaccate |
Country Status (7)
Country | Link |
---|---|
US (1) | US4049521A (it) |
JP (1) | JPS6035820B2 (it) |
CA (1) | CA1071578A (it) |
DE (1) | DE2526382C3 (it) |
FR (1) | FR2314265A1 (it) |
GB (1) | GB1554282A (it) |
IT (1) | IT1061545B (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0007805B1 (en) * | 1978-07-29 | 1983-02-16 | Fujitsu Limited | A method of coating side walls of semiconductor devices |
DE3002194A1 (de) * | 1980-01-22 | 1981-07-23 | Berna AG Olten, Olten | Vorrichtung zur (teil) beschichtung eines substrates durch kathodenzerstaeubung, vefahren zur beschichtung und deren anwendung |
US4432132A (en) * | 1981-12-07 | 1984-02-21 | Bell Telephone Laboratories, Incorporated | Formation of sidewall oxide layers by reactive oxygen ion etching to define submicron features |
DE19712207B4 (de) * | 1997-03-24 | 2006-03-16 | ITT Mfg. Enterprises, Inc., Wilmington | Wischhebel mit Verkleidung für eine Wischvorrichtung zum Säubern von Scheiben an Fahrzeugen |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3097154A (en) * | 1959-01-13 | 1963-07-09 | Nuclear Materials & Equipment | Apparatus for method for etching objects |
US3816198A (en) * | 1969-09-22 | 1974-06-11 | G Babcock | Selective plasma etching of organic materials employing photolithographic techniques |
-
1975
- 1975-06-13 DE DE2526382A patent/DE2526382C3/de not_active Expired
-
1976
- 1976-06-07 US US05/693,491 patent/US4049521A/en not_active Expired - Lifetime
- 1976-06-10 IT IT24168/76A patent/IT1061545B/it active
- 1976-06-10 CA CA254,583A patent/CA1071578A/en not_active Expired
- 1976-06-10 GB GB24078/76A patent/GB1554282A/en not_active Expired
- 1976-06-11 JP JP51067868A patent/JPS6035820B2/ja not_active Expired
- 1976-06-11 FR FR7617676A patent/FR2314265A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
DE2526382A1 (de) | 1976-12-23 |
DE2526382B2 (de) | 1979-03-01 |
US4049521A (en) | 1977-09-20 |
JPS51151078A (en) | 1976-12-25 |
CA1071578A (en) | 1980-02-12 |
FR2314265B1 (it) | 1981-12-18 |
FR2314265A1 (fr) | 1977-01-07 |
JPS6035820B2 (ja) | 1985-08-16 |
DE2526382C3 (de) | 1979-10-25 |
GB1554282A (en) | 1979-10-17 |
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