IN2015DN00016A - - Google Patents

Info

Publication number
IN2015DN00016A
IN2015DN00016A IN16DEN2015A IN2015DN00016A IN 2015DN00016 A IN2015DN00016 A IN 2015DN00016A IN 16DEN2015 A IN16DEN2015 A IN 16DEN2015A IN 2015DN00016 A IN2015DN00016 A IN 2015DN00016A
Authority
IN
India
Prior art keywords
sensor
optical
multimode
light
waveguide
Prior art date
Application number
Other languages
English (en)
Inventor
Kasper Reck
Christian Østergaard
Ole Hansen
Erik Vilain Thomsen
Original Assignee
Univ Denmark Tech Dtu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Denmark Tech Dtu filed Critical Univ Denmark Tech Dtu
Publication of IN2015DN00016A publication Critical patent/IN2015DN00016A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/24Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G01L1/246Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/061Sources
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/063Illuminating optical parts
    • G01N2201/0633Directed, collimated illumination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides
    • G01N2201/084Fibres for remote transmission

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Transform (AREA)
IN16DEN2015 2012-06-06 2013-06-06 IN2015DN00016A (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261656051P 2012-06-06 2012-06-06
EP12171002 2012-06-06
PCT/EP2013/061701 WO2013182643A1 (fr) 2012-06-06 2013-06-06 Capteur optique de système microélectromécanique (mems)

Publications (1)

Publication Number Publication Date
IN2015DN00016A true IN2015DN00016A (fr) 2015-05-22

Family

ID=49711443

Family Applications (1)

Application Number Title Priority Date Filing Date
IN16DEN2015 IN2015DN00016A (fr) 2012-06-06 2013-06-06

Country Status (7)

Country Link
US (1) US9574956B2 (fr)
EP (1) EP2859315B1 (fr)
CN (1) CN104603592B (fr)
CA (1) CA2875925A1 (fr)
EA (1) EA028598B1 (fr)
IN (1) IN2015DN00016A (fr)
WO (1) WO2013182643A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2904378B1 (fr) * 2012-10-08 2018-03-28 Agency For Science, Technology And Research Capteur d'indice de réfraction pour analyse d'analyte et procédé de fabrication de celui-ci
DE102013209248B4 (de) * 2013-05-17 2021-02-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DK3004829T3 (en) * 2013-06-06 2018-04-30 Univ Denmark Tech Dtu Optical pressure sensor
US9728567B2 (en) * 2013-12-02 2017-08-08 United Microelectronics Corp. Semiconductor sensor device
TWI597910B (zh) * 2016-10-03 2017-09-01 國立交通大學 光學元件、壓力感測元件以及壓力感測裝置
US10571633B1 (en) * 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
TWI633287B (zh) * 2017-08-10 2018-08-21 國立交通大學 光學應力感測元件、系統及方法
SG11202002893PA (en) * 2017-10-12 2020-04-29 Agency Science Tech & Res Chemical sensor and method of forming the same
CN108195494B (zh) * 2018-03-13 2023-08-22 南京信息工程大学 一种基于狭缝表面等离激元效应的光学压力传感器及压力检测方法
CN110531513B (zh) * 2019-09-03 2022-02-15 山东大学 一种mems换能结构及其应用
CN111555100A (zh) * 2020-04-29 2020-08-18 山西大学 利用三模光机械系统产生高阶横模压缩光的装置和方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819528A (ja) * 1981-07-28 1983-02-04 Shimadzu Corp 光圧力センサ
DE19754910C2 (de) 1997-12-10 1999-12-02 Geoforschungszentrum Potsdam Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren
CN2527959Y (zh) * 2002-02-15 2002-12-25 燕山大学 用于埋入混凝土结构的光纤应变传感器
CN1648637A (zh) * 2005-01-29 2005-08-03 山西大学 一种光纤气体传感器
US7668419B2 (en) * 2006-10-23 2010-02-23 Weatherford/Lamb, Inc. Evanescent sensor using a hollow-core ring mode waveguide

Also Published As

Publication number Publication date
EA201492196A1 (ru) 2015-04-30
CA2875925A1 (fr) 2013-12-12
WO2013182643A1 (fr) 2013-12-12
US9574956B2 (en) 2017-02-21
CN104603592B (zh) 2018-01-26
US20150131100A1 (en) 2015-05-14
CN104603592A (zh) 2015-05-06
EP2859315B1 (fr) 2021-07-21
EA028598B1 (ru) 2017-12-29
EP2859315A1 (fr) 2015-04-15

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