IN2015DN00016A - - Google Patents

Info

Publication number
IN2015DN00016A
IN2015DN00016A IN16DEN2015A IN2015DN00016A IN 2015DN00016 A IN2015DN00016 A IN 2015DN00016A IN 16DEN2015 A IN16DEN2015 A IN 16DEN2015A IN 2015DN00016 A IN2015DN00016 A IN 2015DN00016A
Authority
IN
India
Prior art keywords
sensor
optical
multimode
light
waveguide
Prior art date
Application number
Other languages
English (en)
Inventor
Kasper Reck
Christian Østergaard
Ole Hansen
Erik Vilain Thomsen
Original Assignee
Univ Denmark Tech Dtu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Denmark Tech Dtu filed Critical Univ Denmark Tech Dtu
Publication of IN2015DN00016A publication Critical patent/IN2015DN00016A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • G01N2201/084—Fibres for remote transmission

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Transform (AREA)
IN16DEN2015 2012-06-06 2013-06-06 IN2015DN00016A (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261656051P 2012-06-06 2012-06-06
EP12171002 2012-06-06
PCT/EP2013/061701 WO2013182643A1 (en) 2012-06-06 2013-06-06 Mems optical sensor

Publications (1)

Publication Number Publication Date
IN2015DN00016A true IN2015DN00016A (de) 2015-05-22

Family

ID=49711443

Family Applications (1)

Application Number Title Priority Date Filing Date
IN16DEN2015 IN2015DN00016A (de) 2012-06-06 2013-06-06

Country Status (7)

Country Link
US (1) US9574956B2 (de)
EP (1) EP2859315B1 (de)
CN (1) CN104603592B (de)
CA (1) CA2875925A1 (de)
EA (1) EA028598B1 (de)
IN (1) IN2015DN00016A (de)
WO (1) WO2013182643A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105209883B (zh) * 2012-10-08 2018-06-12 新加坡科技研究局 用于对分析物进行分析的折射率传感器及其制造方法
DE102013209248B4 (de) * 2013-05-17 2021-02-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
CN105452832B (zh) * 2013-06-06 2018-11-30 丹麦技术大学 全光压力传感器
US9728567B2 (en) * 2013-12-02 2017-08-08 United Microelectronics Corp. Semiconductor sensor device
TWI597910B (zh) * 2016-10-03 2017-09-01 國立交通大學 光學元件、壓力感測元件以及壓力感測裝置
US10571633B1 (en) * 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
TWI633287B (zh) * 2017-08-10 2018-08-21 國立交通大學 光學應力感測元件、系統及方法
SG11202002893PA (en) * 2017-10-12 2020-04-29 Agency Science Tech & Res Chemical sensor and method of forming the same
CN108195494B (zh) * 2018-03-13 2023-08-22 南京信息工程大学 一种基于狭缝表面等离激元效应的光学压力传感器及压力检测方法
CN110531513B (zh) * 2019-09-03 2022-02-15 山东大学 一种mems换能结构及其应用
CN111555100A (zh) * 2020-04-29 2020-08-18 山西大学 利用三模光机械系统产生高阶横模压缩光的装置和方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819528A (ja) * 1981-07-28 1983-02-04 Shimadzu Corp 光圧力センサ
DE19754910C2 (de) * 1997-12-10 1999-12-02 Geoforschungszentrum Potsdam Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren
CN2527959Y (zh) * 2002-02-15 2002-12-25 燕山大学 用于埋入混凝土结构的光纤应变传感器
CN1648637A (zh) * 2005-01-29 2005-08-03 山西大学 一种光纤气体传感器
US7668419B2 (en) * 2006-10-23 2010-02-23 Weatherford/Lamb, Inc. Evanescent sensor using a hollow-core ring mode waveguide

Also Published As

Publication number Publication date
EP2859315A1 (de) 2015-04-15
EA028598B1 (ru) 2017-12-29
US20150131100A1 (en) 2015-05-14
EP2859315B1 (de) 2021-07-21
CA2875925A1 (en) 2013-12-12
EA201492196A1 (ru) 2015-04-30
US9574956B2 (en) 2017-02-21
WO2013182643A1 (en) 2013-12-12
CN104603592A (zh) 2015-05-06
CN104603592B (zh) 2018-01-26

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