IN2014KN02414A - - Google Patents

Info

Publication number
IN2014KN02414A
IN2014KN02414A IN2414KON2014A IN2014KN02414A IN 2014KN02414 A IN2014KN02414 A IN 2014KN02414A IN 2414KON2014 A IN2414KON2014 A IN 2414KON2014A IN 2014KN02414 A IN2014KN02414 A IN 2014KN02414A
Authority
IN
India
Prior art keywords
load
frequency power
voltage
supply unit
electricity supply
Prior art date
Application number
Inventor
Itsuo Yuzurihara
Satoshi Aikawa
Hiroshi Kunitama
Original Assignee
Kyosan Electric Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electric Mfg filed Critical Kyosan Electric Mfg
Publication of IN2014KN02414A publication Critical patent/IN2014KN02414A/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H02M7/53871—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/26—Matching networks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Inverter Devices (AREA)

Abstract

A load end voltage is brought to a high voltage, and an ignition voltage is selected whereby the load end voltage of a plasma load is high enough to produce plasma discharge. In the supply of high-frequency power to the load, which is performed from a high-frequency power source through an electricity supply unit: (a) the internal impedance of the high-frequency power source is lower than the characteristic impedance of the electricity supply unit; and (b) the electric length (LE) of the electricity supply unit connecting the high-frequency power source and the load and supplying high-frequency power is selected so as to have a predetermined relationship to the basic wavelength (λ) of a high-frequency alternating current, whereby the load end voltage is brought to a high voltage. The selection of the electric length (LE) of the electricity supply unit is made so that the relationship of the electric length (LE) when the load end, which is the input end of the load, is in an open state to the basic wavelength (λ) of the high-frequency alternating current is: (2n-1) • (λ/4)-k • λ ≤ L E ≤ (2n-1) • (λ/4)+k • λ (n being an integer and k being [π-2 • cos-1 (1/K)]/(4π)).
IN2414KON2014 2012-06-18 2013-06-03 IN2014KN02414A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012137140A JP5534366B2 (en) 2012-06-18 2012-06-18 High frequency power supply device and ignition voltage selection method
PCT/JP2013/065338 WO2013190986A1 (en) 2012-06-18 2013-06-03 High-frequency power supply device and ignition voltage selection method

Publications (1)

Publication Number Publication Date
IN2014KN02414A true IN2014KN02414A (en) 2015-05-01

Family

ID=49768588

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2414KON2014 IN2014KN02414A (en) 2012-06-18 2013-06-03

Country Status (10)

Country Link
US (1) US9072159B2 (en)
EP (1) EP2833702B1 (en)
JP (1) JP5534366B2 (en)
KR (1) KR101556874B1 (en)
CN (1) CN104322153B (en)
DE (1) DE13806362T1 (en)
IN (1) IN2014KN02414A (en)
PL (1) PL2833702T3 (en)
TW (1) TWI472271B (en)
WO (1) WO2013190986A1 (en)

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KR102223875B1 (en) 2019-10-30 2021-03-05 주식회사 뉴파워 프라즈마 High frequency power device for dry etching equipment with multiple frequencies
US11830708B2 (en) 2020-01-10 2023-11-28 COMET Technologies USA, Inc. Inductive broad-band sensors for electromagnetic waves
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US11887820B2 (en) 2020-01-10 2024-01-30 COMET Technologies USA, Inc. Sector shunts for plasma-based wafer processing systems
US11521832B2 (en) 2020-01-10 2022-12-06 COMET Technologies USA, Inc. Uniformity control for radio frequency plasma processing systems
US11605527B2 (en) 2020-01-20 2023-03-14 COMET Technologies USA, Inc. Pulsing control match network
US11961711B2 (en) 2020-01-20 2024-04-16 COMET Technologies USA, Inc. Radio frequency match network and generator
US11373844B2 (en) 2020-09-28 2022-06-28 COMET Technologies USA, Inc. Systems and methods for repetitive tuning of matching networks
US12057296B2 (en) 2021-02-22 2024-08-06 COMET Technologies USA, Inc. Electromagnetic field sensing device
US11923175B2 (en) 2021-07-28 2024-03-05 COMET Technologies USA, Inc. Systems and methods for variable gain tuning of matching networks
JP7473510B2 (en) * 2021-08-31 2024-04-23 株式会社京三製作所 RF band power supply device and pulse width modulation control method
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US12243717B2 (en) 2022-04-04 2025-03-04 COMET Technologies USA, Inc. Variable reactance device having isolated gate drive power supplies
US11657980B1 (en) 2022-05-09 2023-05-23 COMET Technologies USA, Inc. Dielectric fluid variable capacitor
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Also Published As

Publication number Publication date
KR20140146231A (en) 2014-12-24
CN104322153A (en) 2015-01-28
US20150115797A1 (en) 2015-04-30
WO2013190986A1 (en) 2013-12-27
EP2833702B1 (en) 2016-12-14
JP5534366B2 (en) 2014-06-25
TW201401938A (en) 2014-01-01
US9072159B2 (en) 2015-06-30
TWI472271B (en) 2015-02-01
JP2014002909A (en) 2014-01-09
CN104322153B (en) 2016-05-25
DE13806362T1 (en) 2015-04-30
EP2833702A1 (en) 2015-02-04
PL2833702T3 (en) 2017-05-31
EP2833702A4 (en) 2015-08-05
KR101556874B1 (en) 2015-10-01

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