IN2012DN02318A - - Google Patents

Download PDF

Info

Publication number
IN2012DN02318A
IN2012DN02318A IN2318DEN2012A IN2012DN02318A IN 2012DN02318 A IN2012DN02318 A IN 2012DN02318A IN 2318DEN2012 A IN2318DEN2012 A IN 2318DEN2012A IN 2012DN02318 A IN2012DN02318 A IN 2012DN02318A
Authority
IN
India
Prior art keywords
averaged
coating
gas phase
range
percentual
Prior art date
Application number
Inventor
Frank Hergert
Jan Rudolf Thyen
Volker Probst
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of IN2012DN02318A publication Critical patent/IN2012DN02318A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02165Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors using interference filters, e.g. multilayer dielectric filters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/048Encapsulation of modules
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H01L31/022483Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884Manufacture of transparent electrodes, e.g. TCO, ITO
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Filters (AREA)

Abstract

A method for producing a substrate having a colored interference filter layer, comprising a polycrystalline metal oxide or polycrystalline metal oxides, deposited by gas phase deposition using a coating system, the method comprising depositing, at least two coating layers from a gas phase, each on top of the other, forming polycrystalline metal oxides having an average thickness of each coating layer in a range of about 50nm to 250nm, particularly in a range of about 90nm to 210nm, wherein averaged percentual atomic components of at least one metal present in at least two coating layers deviates from an averaged percentual composition of each metal by not more than +/-20% atoms.
IN2318DEN2012 2009-09-23 2010-09-23 IN2012DN02318A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09012122A EP2302688A1 (en) 2009-09-23 2009-09-23 Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
PCT/EP2010/064052 WO2011036209A1 (en) 2009-09-23 2010-09-23 Method for producing a substrate having a colored interference filter layer, said substrate comprising a colored interference filter layer, the use of said substrate as a colored solar cell or as a colored solar module or as a component thereof, and an array comprising at least two of said substrates

Publications (1)

Publication Number Publication Date
IN2012DN02318A true IN2012DN02318A (en) 2015-08-21

Family

ID=41571808

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2318DEN2012 IN2012DN02318A (en) 2009-09-23 2010-09-23

Country Status (6)

Country Link
US (1) US9312413B2 (en)
EP (1) EP2302688A1 (en)
KR (1) KR101706411B1 (en)
CN (1) CN102498574B (en)
IN (1) IN2012DN02318A (en)
WO (1) WO2011036209A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2302688A1 (en) 2009-09-23 2011-03-30 Robert Bosch GmbH Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
US20140159637A1 (en) * 2012-08-19 2014-06-12 EnergyBionics, LLC Portable energy harvesting, storing, and charging device
JP7096251B2 (en) * 2017-08-10 2022-07-05 株式会社カネカ Solar cell module
KR102267497B1 (en) * 2018-02-13 2021-06-21 국민대학교산학협력단 Colorful Thin Film Solar Cell for Minimizing Efficiency Reduction
EP3531458B1 (en) 2018-02-23 2020-09-09 (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. Solar module with homogeneous colour effect
CN108706889A (en) * 2018-05-08 2018-10-26 北京汉能光伏投资有限公司 A kind of film-coated plate and preparation method thereof and a kind of solar components
WO2021118982A1 (en) * 2019-12-10 2021-06-17 Trustees Of Boston University Apparatus and method for biomolecular analysis

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142576A (en) 1983-12-28 1985-07-27 Seiko Epson Corp Thin film solar battery substrate
JPS60148174A (en) 1984-01-12 1985-08-05 Seikosha Co Ltd Colored solar cell
JP2504610B2 (en) 1990-07-26 1996-06-05 株式会社東芝 Power semiconductor device
JP2985376B2 (en) 1991-06-27 1999-11-29 日本電気株式会社 Automatic frequency control circuit
EP0794270B1 (en) 1996-03-06 2000-06-14 Canon Kabushiki Kaisha Process for production of zinc oxide thin film, and process for production of semiconductor device substrate and process for production of photoelectric conversion device using the same film
US5849108A (en) * 1996-04-26 1998-12-15 Canon Kabushiki Kaisha Photovoltaic element with zno layer having increasing fluorine content in layer thickness direction
JPH09307132A (en) 1996-05-20 1997-11-28 Citizen Watch Co Ltd Solar cell device and manufacture thereof
US6238808B1 (en) * 1998-01-23 2001-05-29 Canon Kabushiki Kaisha Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device
JP4106735B2 (en) 1998-04-13 2008-06-25 凸版印刷株式会社 Reflective display with solar cells
JP2000208793A (en) 1999-01-18 2000-07-28 Fuji Electric Co Ltd Solar cell module and its manufacture
US6459035B2 (en) 1999-12-27 2002-10-01 Asulab S.A. Photovoltaic cell having a colored appearance, particularly for a watch dial
JP2002148362A (en) 2001-09-17 2002-05-22 Seiko Epson Corp Timepiece with solar cell
WO2004017452A1 (en) * 2002-08-13 2004-02-26 Bridgestone Corporation Improvement of dye-sensitized solar cell
DE102004005050A1 (en) 2004-01-30 2005-08-25 Detlef Schulz Method for energy conversion of solar radiation into electricity and heat with color-selective interference filter mirrors and a device of a concentrator solar collector with color-selective mirrors for the application of the method
WO2006014608A1 (en) * 2004-07-21 2006-02-09 Tru Vue, Inc. Substrate coating
US20090078316A1 (en) 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
US8058549B2 (en) * 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
WO2009085601A2 (en) 2007-12-21 2009-07-09 Qualcom Mems Technologies, Inc. Multijunction photovoltaic cells
DK2261996T3 (en) * 2009-06-10 2011-08-29 Suinno Solar Oy High performance solar cell
EP2302688A1 (en) 2009-09-23 2011-03-30 Robert Bosch GmbH Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
US20130025679A1 (en) * 2009-11-25 2013-01-31 Sharp Kabushiki Kaisha Solar cell module and solar power generation device

Also Published As

Publication number Publication date
US9312413B2 (en) 2016-04-12
KR101706411B1 (en) 2017-02-13
US20120298194A1 (en) 2012-11-29
CN102498574B (en) 2017-05-24
CN102498574A (en) 2012-06-13
EP2302688A1 (en) 2011-03-30
WO2011036209A1 (en) 2011-03-31
KR20120072377A (en) 2012-07-03

Similar Documents

Publication Publication Date Title
IN2012DN02318A (en)
WO2015091781A3 (en) Method of producing transition metal dichalcogenide layer
WO2010065966A3 (en) High rate deposition of thin films with improved barrier layer properties
WO2009122361A3 (en) Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films
WO2013046155A8 (en) Tungsten diazabutadiene molecules, their synthesis, and their use for tungsten containing film depositions
MX2012001920A (en) DIRECT THERMAL SPRAY SYNTHESIS OF Li ION BATTERY COMPONENTS.
WO2011106072A3 (en) Use of ruthenium tetroxide as a precursor and reactant for thin film depositions
WO2012138480A3 (en) Methods for producing complex films, and films produced thereby
WO2012142439A8 (en) Method and apparatus for ion-assisted atomic layer deposition
WO2012012026A3 (en) Metal film deposition
WO2010062582A3 (en) Vapor deposition method for ternary compounds
WO2012067439A3 (en) Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
WO2010055423A8 (en) Tellurium precursors for film deposition
MX2013010002A (en) Coated solid pharmaceutical preparation.
TW200940738A (en) Method for forming a titanium-containing layer on a substrate using an ALD process
GB201216405D0 (en) Multilayer coated wear-resistant member and method for making the same
WO2012138671A3 (en) Highly porous ceramic material and method of use and forming same
WO2011138331A3 (en) Pvd hybrid method for depositing mixed crystal layers
MX2013007284A (en) Substrate with a corrosion resistant coating and method of production thereof.
WO2010056559A3 (en) Gradient composition barrier
WO2012030566A3 (en) Electroless nickel alloy plating bath and process for depositing thereof
WO2013009913A3 (en) Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier films
WO2011092017A8 (en) Method for producing a coated item by means of texture etching
WO2011092236A3 (en) Bath deposition solution for the wet-chemical deposition of a metal sulfide layer and related production method
WO2010010538A3 (en) Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films