IN2012DN02318A - - Google Patents

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Publication number
IN2012DN02318A
IN2012DN02318A IN2318DEN2012A IN2012DN02318A IN 2012DN02318 A IN2012DN02318 A IN 2012DN02318A IN 2318DEN2012 A IN2318DEN2012 A IN 2318DEN2012A IN 2012DN02318 A IN2012DN02318 A IN 2012DN02318A
Authority
IN
India
Prior art keywords
averaged
coating
gas phase
range
percentual
Prior art date
Application number
Inventor
Frank Hergert
Jan Rudolf Thyen
Volker Probst
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of IN2012DN02318A publication Critical patent/IN2012DN02318A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02165—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors using interference filters, e.g. multilayer dielectric filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/048—Encapsulation of modules
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H01L31/022483—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Filters (AREA)

Abstract

A method for producing a substrate having a colored interference filter layer, comprising a polycrystalline metal oxide or polycrystalline metal oxides, deposited by gas phase deposition using a coating system, the method comprising depositing, at least two coating layers from a gas phase, each on top of the other, forming polycrystalline metal oxides having an average thickness of each coating layer in a range of about 50nm to 250nm, particularly in a range of about 90nm to 210nm, wherein averaged percentual atomic components of at least one metal present in at least two coating layers deviates from an averaged percentual composition of each metal by not more than +/-20% atoms.
IN2318DEN2012 2009-09-23 2010-09-23 IN2012DN02318A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09012122A EP2302688A1 (en) 2009-09-23 2009-09-23 Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
PCT/EP2010/064052 WO2011036209A1 (en) 2009-09-23 2010-09-23 Method for producing a substrate having a colored interference filter layer, said substrate comprising a colored interference filter layer, the use of said substrate as a colored solar cell or as a colored solar module or as a component thereof, and an array comprising at least two of said substrates

Publications (1)

Publication Number Publication Date
IN2012DN02318A true IN2012DN02318A (en) 2015-08-21

Family

ID=41571808

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2318DEN2012 IN2012DN02318A (en) 2009-09-23 2010-09-23

Country Status (6)

Country Link
US (1) US9312413B2 (en)
EP (1) EP2302688A1 (en)
KR (1) KR101706411B1 (en)
CN (1) CN102498574B (en)
IN (1) IN2012DN02318A (en)
WO (1) WO2011036209A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2302688A1 (en) 2009-09-23 2011-03-30 Robert Bosch GmbH Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
US20140159638A1 (en) * 2012-08-19 2014-06-12 EnergyBionics, LLC Portable energy harvesting, storing, and charging device
WO2019031023A1 (en) * 2017-08-10 2019-02-14 株式会社カネカ Solar cell module
KR102267497B1 (en) * 2018-02-13 2021-06-21 국민대학교산학협력단 Colorful Thin Film Solar Cell for Minimizing Efficiency Reduction
ES2837041T3 (en) 2018-02-23 2021-06-29 Cnbm Bengbu Design & Res Institute For Glass Industry Co Ltd Solar module with homogeneous color effect
CN108706889A (en) * 2018-05-08 2018-10-26 北京汉能光伏投资有限公司 A kind of film-coated plate and preparation method thereof and a kind of solar components
US11137343B2 (en) * 2019-12-10 2021-10-05 Trustees Of Boston University Apparatus and method for biomolecular analysis

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
JPS60142576A (en) 1983-12-28 1985-07-27 Seiko Epson Corp Thin film solar battery substrate
JPS60148174A (en) 1984-01-12 1985-08-05 Seikosha Co Ltd Colored solar cell
JP2504610B2 (en) 1990-07-26 1996-06-05 株式会社東芝 Power semiconductor device
JP2985376B2 (en) 1991-06-27 1999-11-29 日本電気株式会社 Automatic frequency control circuit
DE69702277T2 (en) 1996-03-06 2001-03-01 Canon Kk A method of manufacturing a thin zinc oxide film and a method of manufacturing a substrate of a semiconductor device, and a method of manufacturing a photoelectric conversion device using this film
US5849108A (en) * 1996-04-26 1998-12-15 Canon Kabushiki Kaisha Photovoltaic element with zno layer having increasing fluorine content in layer thickness direction
JPH09307132A (en) 1996-05-20 1997-11-28 Citizen Watch Co Ltd Solar cell device and manufacture thereof
US6238808B1 (en) 1998-01-23 2001-05-29 Canon Kabushiki Kaisha Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device
JP4106735B2 (en) 1998-04-13 2008-06-25 凸版印刷株式会社 Reflective display with solar cells
JP2000208793A (en) 1999-01-18 2000-07-28 Fuji Electric Co Ltd Solar cell module and its manufacture
US6459035B2 (en) 1999-12-27 2002-10-01 Asulab S.A. Photovoltaic cell having a colored appearance, particularly for a watch dial
JP2002148362A (en) 2001-09-17 2002-05-22 Seiko Epson Corp Timepiece with solar cell
EP1536508B1 (en) 2002-08-13 2014-06-25 Bridgestone Corporation Improvement of dye-sensitized solar cell
DE102004005050A1 (en) 2004-01-30 2005-08-25 Detlef Schulz Method for energy conversion of solar radiation into electricity and heat with color-selective interference filter mirrors and a device of a concentrator solar collector with color-selective mirrors for the application of the method
WO2006014608A1 (en) 2004-07-21 2006-02-09 Tru Vue, Inc. Substrate coating
US20090078316A1 (en) 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
US8058549B2 (en) * 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
JP2011508430A (en) 2007-12-21 2011-03-10 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Multi-junction photovoltaic cell
EP2261996B8 (en) * 2009-06-10 2011-10-19 Suinno Solar Oy High power solar cell
EP2302688A1 (en) 2009-09-23 2011-03-30 Robert Bosch GmbH Method for producing a substrate with a coloured interference filter coating, this substrate, interference filter coating, the use of this substrate as coloured solar cell or as coloured solar cell or as component of same and an array comprising at least two of thee substrates
US20130025679A1 (en) * 2009-11-25 2013-01-31 Sharp Kabushiki Kaisha Solar cell module and solar power generation device

Also Published As

Publication number Publication date
KR20120072377A (en) 2012-07-03
US20120298194A1 (en) 2012-11-29
CN102498574B (en) 2017-05-24
CN102498574A (en) 2012-06-13
US9312413B2 (en) 2016-04-12
KR101706411B1 (en) 2017-02-13
WO2011036209A1 (en) 2011-03-31
EP2302688A1 (en) 2011-03-30

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