IN173158B - - Google Patents
Info
- Publication number
- IN173158B IN173158B IN757MA1989A IN173158B IN 173158 B IN173158 B IN 173158B IN 757MA1989 A IN757MA1989 A IN 757MA1989A IN 173158 B IN173158 B IN 173158B
- Authority
- IN
- India
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IN757MA1989 IN173158B (en:Method) | 1989-10-13 | 1989-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IN757MA1989 IN173158B (en:Method) | 1989-10-13 | 1989-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN173158B true IN173158B (en:Method) | 1994-02-19 |
Family
ID=11096201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN757MA1989 IN173158B (en:Method) | 1989-10-13 | 1989-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| IN (1) | IN173158B (en:Method) |
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1989
- 1989-10-13 IN IN757MA1989 patent/IN173158B/en unknown