IN173158B - - Google Patents

Info

Publication number
IN173158B
IN173158B IN757MA1989A IN173158B IN 173158 B IN173158 B IN 173158B IN 757MA1989 A IN757MA1989 A IN 757MA1989A IN 173158 B IN173158 B IN 173158B
Authority
IN
India
Application number
Other languages
English (en)
Inventor
Gerasimos D Danilates
Original Assignee
Electroscan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electroscan Corp filed Critical Electroscan Corp
Priority to IN757MA1989 priority Critical patent/IN173158B/en
Publication of IN173158B publication Critical patent/IN173158B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
IN757MA1989 1989-10-13 1989-10-13 IN173158B (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IN757MA1989 IN173158B (enrdf_load_stackoverflow) 1989-10-13 1989-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IN757MA1989 IN173158B (enrdf_load_stackoverflow) 1989-10-13 1989-10-13

Publications (1)

Publication Number Publication Date
IN173158B true IN173158B (enrdf_load_stackoverflow) 1994-02-19

Family

ID=11096201

Family Applications (1)

Application Number Title Priority Date Filing Date
IN757MA1989 IN173158B (enrdf_load_stackoverflow) 1989-10-13 1989-10-13

Country Status (1)

Country Link
IN (1) IN173158B (enrdf_load_stackoverflow)

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