Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/830,072external-prioritypatent/US4690830A/en
Priority claimed from IN123/CAL/87Aexternal-prioritypatent/IN168381B/en
Application filed by Solarex CorpfiledCriticalSolarex Corp
Priority to IN712/CAL/89ApriorityCriticalpatent/IN169759B/en
Publication of IN169759BpublicationCriticalpatent/IN169759B/en
Activation by dehydrogenation or dehalogenation of deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices