IN160089B - - Google Patents

Info

Publication number
IN160089B
IN160089B IN403/DEL/83A IN403DE1983A IN160089B IN 160089 B IN160089 B IN 160089B IN 403DE1983 A IN403DE1983 A IN 403DE1983A IN 160089 B IN160089 B IN 160089B
Authority
IN
India
Application number
IN403/DEL/83A
Other languages
English (en)
Inventor
Vladimir Vukanovic
Original Assignee
Standard Oil Co Ohio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Oil Co Ohio filed Critical Standard Oil Co Ohio
Publication of IN160089B publication Critical patent/IN160089B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
IN403/DEL/83A 1982-07-14 1983-06-15 IN160089B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39815182A 1982-07-14 1982-07-14

Publications (1)

Publication Number Publication Date
IN160089B true IN160089B (de) 1987-06-27

Family

ID=23574191

Family Applications (1)

Application Number Title Priority Date Filing Date
IN403/DEL/83A IN160089B (de) 1982-07-14 1983-06-15

Country Status (5)

Country Link
EP (1) EP0099725A3 (de)
JP (1) JPS5929031A (de)
KR (1) KR840005494A (de)
CA (1) CA1197493A (de)
IN (1) IN160089B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910000508B1 (ko) * 1984-08-31 1991-01-26 니찌덴 아넬바 가부시끼가이샤 동적자계를 이용한 방전 반응장치
US4668365A (en) * 1984-10-25 1987-05-26 Applied Materials, Inc. Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition
CH664768A5 (de) * 1985-06-20 1988-03-31 Balzers Hochvakuum Verfahren zur beschichtung von substraten in einer vakuumkammer.
EP0383962A1 (de) * 1989-02-20 1990-08-29 Hauzer Holding B.V. Hochspannungsgleichrichter und zugeordnete Steuerelektronik
DE69226360T2 (de) * 1991-03-25 1999-02-25 Commw Scient Ind Res Org Makroteilchenfilter in lichtbogenquelle
US5587207A (en) * 1994-11-14 1996-12-24 Gorokhovsky; Vladimir I. Arc assisted CVD coating and sintering method
US5478608A (en) * 1994-11-14 1995-12-26 Gorokhovsky; Vladimir I. Arc assisted CVD coating method and apparatus
KR102502054B1 (ko) * 2022-07-21 2023-02-22 (주)이엠씨 모듈타입의 조립체를 구비한 선박용 플라즈마 밸러스트수 처리장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB808442A (en) * 1955-06-15 1959-02-04 Du Pont Process of carrying out high temperature reactions by means of a continuous rotating electric arc and apparatus therefor
US3416021A (en) * 1966-05-11 1968-12-10 Navy Usa Arc apparatus employing three dimensional arc motion and dynamic balancing
US4003770A (en) * 1975-03-24 1977-01-18 Monsanto Research Corporation Plasma spraying process for preparing polycrystalline solar cells

Also Published As

Publication number Publication date
CA1197493A (en) 1985-12-03
EP0099725A2 (de) 1984-02-01
KR840005494A (ko) 1984-11-14
JPS5929031A (ja) 1984-02-16
EP0099725A3 (de) 1985-01-23

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