IL99960A0 - Viscously coupled dual beam accelerometer - Google Patents

Viscously coupled dual beam accelerometer

Info

Publication number
IL99960A0
IL99960A0 IL99960A IL9996091A IL99960A0 IL 99960 A0 IL99960 A0 IL 99960A0 IL 99960 A IL99960 A IL 99960A IL 9996091 A IL9996091 A IL 9996091A IL 99960 A0 IL99960 A0 IL 99960A0
Authority
IL
Israel
Prior art keywords
dual beam
coupled dual
beam accelerometer
viscously coupled
viscously
Prior art date
Application number
IL99960A
Other languages
English (en)
Original Assignee
Sundstrand Data Control
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Data Control filed Critical Sundstrand Data Control
Publication of IL99960A0 publication Critical patent/IL99960A0/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
IL99960A 1990-11-05 1991-11-05 Viscously coupled dual beam accelerometer IL99960A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/609,270 US5176031A (en) 1990-11-05 1990-11-05 Viscously coupled dual beam accelerometer

Publications (1)

Publication Number Publication Date
IL99960A0 true IL99960A0 (en) 1992-08-18

Family

ID=24440065

Family Applications (1)

Application Number Title Priority Date Filing Date
IL99960A IL99960A0 (en) 1990-11-05 1991-11-05 Viscously coupled dual beam accelerometer

Country Status (3)

Country Link
US (1) US5176031A (xx)
IL (1) IL99960A0 (xx)
WO (1) WO1992008140A1 (xx)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US6295870B1 (en) 1991-02-08 2001-10-02 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5656846A (en) * 1991-06-18 1997-08-12 Nec Corporation Semiconductor acceleration sensor and method of fabrication thereof
US5275048A (en) * 1992-01-21 1994-01-04 Sundstrand Corporation Acceleration overload protection mechanism for sensor devices
US5334901A (en) * 1993-04-30 1994-08-02 Alliedsignal Inc. Vibrating beam accelerometer
US5814727A (en) * 1993-11-08 1998-09-29 Motorola, Inc. Semiconductor accelerometer having reduced sensor plate flexure
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
JP3061864B2 (ja) * 1995-05-31 2000-07-10 リテフ ゲゼルシャフト ミット ベシュレンクテル ハフツング マイクロメカニカル回転速度センサ
US6301965B1 (en) 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
US6393913B1 (en) 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
GB2439606B (en) * 2006-06-29 2011-08-17 C Mac Quartz Crystals Ltd An oscillator
JP2008224345A (ja) * 2007-03-12 2008-09-25 Epson Toyocom Corp 加速度検知ユニット及び加速度センサ
US8186221B2 (en) * 2009-03-24 2012-05-29 Freescale Semiconductor, Inc. Vertically integrated MEMS acceleration transducer
US8176617B2 (en) 2010-03-31 2012-05-15 Honeywell International Inc. Methods for making a sensitive resonating beam accelerometer
US10859596B2 (en) 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer
US11754590B2 (en) * 2019-01-24 2023-09-12 Uti Limited Partnership Particle based accelerometer
CN109725174B (zh) * 2019-03-07 2024-04-30 中国船舶重工集团公司第七0四研究所 复合型振动加速度传感器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4517841A (en) * 1983-01-06 1985-05-21 Sundstrand Data Control, Inc. Accelerometer with beam resonator force transducer
US4712427A (en) * 1985-10-21 1987-12-15 Sundstrand Data Control, Inc. Vibrating beam accelerometer with velocity change output

Also Published As

Publication number Publication date
WO1992008140A1 (en) 1992-05-14
US5176031A (en) 1993-01-05

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