IL87414A - Process methodology for two-sided fabrication of devices on thinned silicon - Google Patents

Process methodology for two-sided fabrication of devices on thinned silicon

Info

Publication number
IL87414A
IL87414A IL87414A IL8741488A IL87414A IL 87414 A IL87414 A IL 87414A IL 87414 A IL87414 A IL 87414A IL 8741488 A IL8741488 A IL 8741488A IL 87414 A IL87414 A IL 87414A
Authority
IL
Israel
Prior art keywords
devices
thinned silicon
process methodology
sided fabrication
sided
Prior art date
Application number
IL87414A
Other versions
IL87414A0 (en
Original Assignee
Santa Barbara Res Center
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/089,786 external-priority patent/US4782028A/en
Application filed by Santa Barbara Res Center filed Critical Santa Barbara Res Center
Publication of IL87414A0 publication Critical patent/IL87414A0/en
Publication of IL87414A publication Critical patent/IL87414A/en

Links

IL87414A 1987-08-27 1988-08-11 Process methodology for two-sided fabrication of devices on thinned silicon IL87414A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/089,786 US4782028A (en) 1987-08-27 1987-08-27 Process methodology for two-sided fabrication of devices on thinned silicon

Publications (2)

Publication Number Publication Date
IL87414A0 IL87414A0 (en) 1989-01-31
IL87414A true IL87414A (en) 1992-11-15

Family

ID=22219576

Family Applications (1)

Application Number Title Priority Date Filing Date
IL87414A IL87414A (en) 1987-08-27 1988-08-11 Process methodology for two-sided fabrication of devices on thinned silicon

Country Status (1)

Country Link
IL (1) IL87414A (en)

Also Published As

Publication number Publication date
IL87414A0 (en) 1989-01-31

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Legal Events

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RH Patent void
MM9K Patent not in force due to non-payment of renewal fees