IL80079A0 - Chemical vapor deposition process
- Google Patents
Chemical vapor deposition process
Info
Publication number
IL80079A0
IL80079A0IL80079AIL8007986AIL80079A0IL 80079 A0IL80079 A0IL 80079A0IL 80079 AIL80079 AIL 80079AIL 8007986 AIL8007986 AIL 8007986AIL 80079 A0IL80079 A0IL 80079A0
Authority
IL
Israel
Prior art keywords
vapor deposition
chemical vapor
deposition process
chemical
vapor
Prior art date
Application number
IL80079A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/412,237external-prioritypatent/US4545327A/en
Application filed by Anicon IncfiledCriticalAnicon Inc
Priority to IL80079ApriorityCriticalpatent/IL80079A0/en
Publication of IL80079A0publicationCriticalpatent/IL80079A0/en