IL41704A0 - Sputter ion pumps - Google Patents

Sputter ion pumps

Info

Publication number
IL41704A0
IL41704A0 IL41704A IL4170473A IL41704A0 IL 41704 A0 IL41704 A0 IL 41704A0 IL 41704 A IL41704 A IL 41704A IL 4170473 A IL4170473 A IL 4170473A IL 41704 A0 IL41704 A0 IL 41704A0
Authority
IL
Israel
Prior art keywords
sputter ion
ion pumps
pumps
sputter
ion
Prior art date
Application number
IL41704A
Other languages
English (en)
Original Assignee
Veeco Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instr Inc filed Critical Veeco Instr Inc
Publication of IL41704A0 publication Critical patent/IL41704A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
IL41704A 1972-03-06 1973-03-06 Sputter ion pumps IL41704A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23182872A 1972-03-06 1972-03-06

Publications (1)

Publication Number Publication Date
IL41704A0 true IL41704A0 (en) 1973-05-31

Family

ID=22870778

Family Applications (1)

Application Number Title Priority Date Filing Date
IL41704A IL41704A0 (en) 1972-03-06 1973-03-06 Sputter ion pumps

Country Status (5)

Country Link
US (1) US3781133A (fr)
JP (1) JPS48104109A (fr)
DE (1) DE2311083A1 (fr)
FR (1) FR2175465A5 (fr)
IL (1) IL41704A0 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2826501B1 (de) * 1978-06-16 1979-11-08 Siemens Ag Evakuierungsvorrichtung zur Erzeugung eines Isoliervakuums um die supraleitende Wicklung eines Rotors
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode

Also Published As

Publication number Publication date
FR2175465A5 (fr) 1973-10-19
DE2311083A1 (de) 1973-09-13
JPS48104109A (fr) 1973-12-27
US3781133A (en) 1973-12-25

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