IL327263A - Laser diffraction optical microscopy for ultra-thin pattern wafer - Google Patents

Laser diffraction optical microscopy for ultra-thin pattern wafer

Info

Publication number
IL327263A
IL327263A IL327263A IL32726326A IL327263A IL 327263 A IL327263 A IL 327263A IL 327263 A IL327263 A IL 327263A IL 32726326 A IL32726326 A IL 32726326A IL 327263 A IL327263 A IL 327263A
Authority
IL
Israel
Prior art keywords
ultra
laser diffraction
diffraction optical
optical microscopy
pattern wafer
Prior art date
Application number
IL327263A
Other languages
Hebrew (he)
Inventor
Ning Ye
Jian Zhang
Yusheng Chang
Zhiwen Kang
Original Assignee
Asml Netherlands B V
Ning Ye
Jian Zhang
Yusheng Chang
Zhiwen Kang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands B V, Ning Ye, Jian Zhang, Yusheng Chang, Zhiwen Kang filed Critical Asml Netherlands B V
Publication of IL327263A publication Critical patent/IL327263A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70653—Metrology techniques
    • G03F7/70675—Latent image, i.e. measuring the image of the exposed resist prior to development

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IL327263A 2023-10-17 2024-09-17 Laser diffraction optical microscopy for ultra-thin pattern wafer IL327263A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202363590919P 2023-10-17 2023-10-17
PCT/EP2024/075988 WO2025082683A1 (en) 2023-10-17 2024-09-17 Laser diffraction optical microscopy for ultra-thin pattern wafer

Publications (1)

Publication Number Publication Date
IL327263A true IL327263A (en) 2026-05-01

Family

ID=92894840

Family Applications (1)

Application Number Title Priority Date Filing Date
IL327263A IL327263A (en) 2023-10-17 2024-09-17 Laser diffraction optical microscopy for ultra-thin pattern wafer

Country Status (3)

Country Link
CN (1) CN122029486A (en)
IL (1) IL327263A (en)
WO (1) WO2025082683A1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0985977A1 (en) * 1998-09-11 2000-03-15 Lucent Technologies Inc. Integrated circuit device fabrication utilizing latent imagery
US9310313B1 (en) * 2014-12-29 2016-04-12 Oracle International Corporation Diffractive imaging of groove structures on optical tape

Also Published As

Publication number Publication date
WO2025082683A1 (en) 2025-04-24
CN122029486A (en) 2026-05-12

Similar Documents

Publication Publication Date Title
JP6622390B2 (en) Alignment sensor and method for providing position measurement
AU2024273946B2 (en) Radiation blockers for contact lenses
EP4365646A4 (en) Composition for forming optical waveguide
IL316976A (en) Confocal chromatic metrology for euv source condition monitoring
HUE068172T2 (en) Block-free lens support for lenses surface machining
GB2428492B (en) Optical apparatus for control of laser beam by providing lateral adjustment of lens groups
GB202504816D0 (en) Optical apparatus for scanning microscopy
GB202504815D0 (en) Optical apparatus for scanning microscopy
GB202504817D0 (en) Optical apparatus for scanning microscopy
GB202304502D0 (en) An optical microscope for wide-field microscopies
GB202012000D0 (en) Scanning depletion laser microscope
CA3300264A1 (en) Beam shaping device for microscopy
GB202401810D0 (en) Optical fibre interfaces for photonic chips
EP4511861A4 (en) AUTOFOCUS IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES
IL320721A (en) Optical system for metrology
EM150384890001S (en) Branch boxes for optical fibres
EM150384890003S (en) Branch boxes for optical fibres
EM150384890002S (en) Branch boxes for optical fibres
CN309419241S (en) Camera insert for microscopes
CN309464779S (en) Camera insert for microscopes
JP2017009830A (en) Optical module and manufacturing method thereof
GB202500194D0 (en) Microscope apparatus
EM151099270001S (en) Branch boxes for optical fibres
AU2024383462A1 (en) Feed-forward lithography adjustment method for photonic devices that correlates optical performance to wafer correction data
CA3281084A1 (en) Semiconductor laser having improved quality