IL327236A - מערכת ושיטה לאספקת קרינת פלט - Google Patents

מערכת ושיטה לאספקת קרינת פלט

Info

Publication number
IL327236A
IL327236A IL327236A IL32723626A IL327236A IL 327236 A IL327236 A IL 327236A IL 327236 A IL327236 A IL 327236A IL 32723626 A IL32723626 A IL 32723626A IL 327236 A IL327236 A IL 327236A
Authority
IL
Israel
Prior art keywords
providing output
output radiation
radiation
providing
output
Prior art date
Application number
IL327236A
Other languages
English (en)
Inventor
Abbing Sylvianne Dorothea Christina Roscam
David O'dwyer
Filippo Campi
Petrus Wilhelmus Smorenburg
Johan Reinink
Original Assignee
Asml Netherlands B V
Abbing Sylvianne Dorothea Christina Roscam
Odwyer David
Filippo Campi
Petrus Wilhelmus Smorenburg
Johan Reinink
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP23211629.3A external-priority patent/EP4560394A1/en
Application filed by Asml Netherlands B V, Abbing Sylvianne Dorothea Christina Roscam, Odwyer David, Filippo Campi, Petrus Wilhelmus Smorenburg, Johan Reinink filed Critical Asml Netherlands B V
Publication of IL327236A publication Critical patent/IL327236A/he

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/354—Third or higher harmonic generation

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IL327236A 2023-10-12 2024-09-25 מערכת ושיטה לאספקת קרינת פלט IL327236A (he)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP23203121 2023-10-12
EP23211629.3A EP4560394A1 (en) 2023-11-23 2023-11-23 System and method for providing output radiation
PCT/EP2024/076876 WO2025078154A1 (en) 2023-10-12 2024-09-25 System and method for providing output radiation

Publications (1)

Publication Number Publication Date
IL327236A true IL327236A (he) 2026-05-01

Family

ID=92895674

Family Applications (1)

Application Number Title Priority Date Filing Date
IL327236A IL327236A (he) 2023-10-12 2024-09-25 מערכת ושיטה לאספקת קרינת פלט

Country Status (3)

Country Link
CN (1) CN121986298A (he)
IL (1) IL327236A (he)
WO (1) WO2025078154A1 (he)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG2010050110A (en) 2002-11-12 2014-06-27 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
US7481579B2 (en) 2006-03-27 2009-01-27 Jordan Valley Applied Radiation Ltd. Overlay metrology using X-rays
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
KR101295203B1 (ko) 2008-10-06 2013-08-09 에이에스엠엘 네델란즈 비.브이. 2차원 타겟을 이용한 리소그래피 포커스 및 조사량 측정
NL2005162A (en) 2009-07-31 2011-02-02 Asml Netherlands Bv Methods and scatterometers, lithographic systems, and lithographic processing cells.
NL2007176A (en) 2010-08-18 2012-02-21 Asml Netherlands Bv Substrate for use in metrology, metrology method and device manufacturing method.
US10801975B2 (en) 2012-05-08 2020-10-13 Kla-Tencor Corporation Metrology tool with combined X-ray and optical scatterometers
US10013518B2 (en) 2012-07-10 2018-07-03 Kla-Tencor Corporation Model building and analysis engine for combined X-ray and optical metrology
KR102109059B1 (ko) 2014-11-26 2020-05-12 에이에스엠엘 네델란즈 비.브이. 계측 방법, 컴퓨터 제품 및 시스템
JP6602388B6 (ja) 2015-03-25 2020-01-15 エーエスエムエル ネザーランズ ビー．ブイ． メトロロジ方法、メトロロジ装置、及びデバイス製造装置
IL256196B (he) 2015-06-17 2022-07-01 Asml Netherlands Bv בחירת מרשם על בסיס הרכב אינטר-מרשם
DK3136143T3 (en) 2015-08-26 2020-05-18 Max Planck Gesellschaft Hollow-Core Fibre and Method of Manufacturing Thereof
CN113376975B (zh) 2015-12-23 2025-01-07 Asml荷兰有限公司 量测方法、量测设备、器件制造方法和计算机程序产品
US11035804B2 (en) 2017-06-28 2021-06-15 Kla Corporation System and method for x-ray imaging and classification of volume defects
US10959318B2 (en) 2018-01-10 2021-03-23 Kla-Tencor Corporation X-ray metrology system with broadband laser produced plasma illuminator

Also Published As

Publication number Publication date
CN121986298A (zh) 2026-05-05
WO2025078154A1 (en) 2025-04-17

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