Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
  • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
  • H01J37/1472—Deflecting along given lines
  • H01J37/1474—Scanning means
  • H01J37/1477—Scanning means electrostatic
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
  • H03F3/45—Differential amplifiers
  • H03F3/45071—Differential amplifiers with semiconductor devices only
  • H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
  • H03F3/45179—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using MOSFET transistors as the active amplifying circuit
  • H03F3/45183—Long tailed pairs
  • H03F3/45188—Non-folded cascode stages
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
  • H03F3/45—Differential amplifiers
  • H03F3/45071—Differential amplifiers with semiconductor devices only
  • H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
  • H03F3/45475—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using IC blocks as the active amplifying circuit
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
  • H03F3/45—Differential amplifiers
  • H03F3/45071—Differential amplifiers with semiconductor devices only
  • H03F3/45479—Differential amplifiers with semiconductor devices only characterised by the way of common mode signal rejection
  • H03F3/45632—Differential amplifiers with semiconductor devices only characterised by the way of common mode signal rejection in differential amplifiers with FET transistors as the active amplifying circuit
  • H03F3/45636—Differential amplifiers with semiconductor devices only characterised by the way of common mode signal rejection in differential amplifiers with FET transistors as the active amplifying circuit by using feedback means
  • H03F3/45641—Measuring at the loading circuit of the differential amplifier
  • H03F3/45659—Controlling the loading circuit of the differential amplifier
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/15—Means for deflecting or directing discharge
  • H01J2237/151—Electrostatic means
  • H01J2237/1518—Electrostatic means for X-Y scanning
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/26—Electron or ion microscopes
  • H01J2237/28—Scanning microscopes
  • H01J2237/2813—Scanning microscopes characterised by the application
  • H01J2237/2817—Pattern inspection
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45082—Indexing scheme relating to differential amplifiers the common mode signal being taken or deducted from the one or more outputs of the differential amplifier
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45134—Indexing scheme relating to differential amplifiers the whole differential amplifier together with other coupled stages being fully differential realised
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45138—Two or more differential amplifiers in IC-block form are combined, e.g. measuring amplifiers
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45418—Indexing scheme relating to differential amplifiers the CMCL comprising a resistor addition circuit
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45424—Indexing scheme relating to differential amplifiers the CMCL comprising a comparator circuit
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
  • H03F2203/45—Indexing scheme relating to differential amplifiers
  • H03F2203/45528—Indexing scheme relating to differential amplifiers the FBC comprising one or more passive resistors and being coupled between the LC and the IC

Landscapes

• Engineering & Computer Science (AREA)
• Power Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Electron Beam Exposure (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=91853489

Family Applications (1)

Country Status (5)

Family Cites Families (3)

• 2024
  • 2024-07-03 IL IL326290A patent/IL326290A/he unknown
  • 2024-07-03 KR KR1020267003419A patent/KR20260046112A/ko active Pending
  • 2024-07-03 CN CN202480050182.5A patent/CN121605500A/zh active Pending
  • 2024-07-03 WO PCT/EP2024/068782 patent/WO2025026641A1/en active Pending
  • 2024-07-10 TW TW113125757A patent/TW202524531A/zh unknown

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