IL312952A - משאבת הקפאה - Google Patents

משאבת הקפאה

Info

Publication number
IL312952A
IL312952A IL312952A IL31295224A IL312952A IL 312952 A IL312952 A IL 312952A IL 312952 A IL312952 A IL 312952A IL 31295224 A IL31295224 A IL 31295224A IL 312952 A IL312952 A IL 312952A
Authority
IL
Israel
Prior art keywords
cryopump
Prior art date
Application number
IL312952A
Other languages
English (en)
Original Assignee
Edwards Vacuum Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum Llc filed Critical Edwards Vacuum Llc
Publication of IL312952A publication Critical patent/IL312952A/he

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IL312952A 2021-12-08 2022-11-30 משאבת הקפאה IL312952A (he)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2117699.5A GB2613595A (en) 2021-12-08 2021-12-08 A cryopump with increased capacity
PCT/IB2022/061581 WO2023105349A1 (en) 2021-12-08 2022-11-30 Cryopump

Publications (1)

Publication Number Publication Date
IL312952A true IL312952A (he) 2024-07-01

Family

ID=80080904

Family Applications (1)

Application Number Title Priority Date Filing Date
IL312952A IL312952A (he) 2021-12-08 2022-11-30 משאבת הקפאה

Country Status (6)

Country Link
KR (1) KR20240116739A (he)
CN (1) CN118401753A (he)
GB (1) GB2613595A (he)
IL (1) IL312952A (he)
TW (1) TW202338210A (he)
WO (1) WO2023105349A1 (he)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5679910B2 (ja) * 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
JP6338403B2 (ja) * 2013-03-25 2018-06-06 住友重機械工業株式会社 クライオポンプ及び真空排気方法
KR101384575B1 (ko) * 2013-12-11 2014-04-11 지브이티 주식회사 소음 및 진동 저감을 위한 극저온 냉동기 및 이를 갖는 크라이오펌프
CN106014917B (zh) * 2015-03-31 2018-07-17 住友重机械工业株式会社 低温泵
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
GB2600479A (en) * 2020-11-02 2022-05-04 Edwards Vacuum Llc Cryopumps and inlet flow restrictors for cryopumps

Also Published As

Publication number Publication date
WO2023105349A1 (en) 2023-06-15
CN118401753A (zh) 2024-07-26
GB2613595A (en) 2023-06-14
TW202338210A (zh) 2023-10-01
GB202117699D0 (en) 2022-01-19
KR20240116739A (ko) 2024-07-30

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