IL295162B2

IL295162B2 - High voltage feed kit

Info

Publication number: IL295162B2
Application number: IL295162A
Authority: IL
Original assignee: Applied Materials Israel Ltd
Priority date: 2022-07-28
Filing date: 2022-07-28
Publication date: 2024-10-01
Also published as: IL295162B1; IL295162A

Description

HIGH-VOLTAGE FEEDTHROUGH KIT BACKGROUND [001] Vacuumed systems (such as but not limited to electron microscopes) are fed by high-voltage signals. High-voltage signals may exceed 500, 1000, 5000, 10000, 20000 volts. [002] A high-voltage signal is provided by a high-voltage plug that includes a plug conductive element that is surrounded by a plug body. [003] The high-voltage plug is connected to a high-voltage feedthrough – while the high-voltage plug and the high-voltage feedthrough are positioned in an atmospheric side of the vacuum system. [004] The high-voltage feedthrough includes a feedthrough conductive element and a feedthrough body. The feedthrough body is configured to receive the plug body. [005] The feedthrough body may define an inner space in which the high-voltage plug is inserted. The high-voltage plug may be regarded to be a male connector and the feedthrough may be regarded as female connector or as a receptacle. [006] The feedthrough body has a rigid exterior that is highly insulative and is usually made of ceramics. [007] A conductive path formed by the plug conductive element and the feedthrough conductive element must be sealed from the atmospheric environment. [008] When the high-voltage plug is pressed against the high-voltage feedthrough – there is a gap between the plug body and the feedthrough body. This gap is filled with grease. The grease also assists in reducing the friction between the plug body and the feedthrough body. [009] Some of the grease maintains stuck to the feedthrough body even after the removal of the high-voltage plug. The grease has a maximal allowable temperature of a relatively low value – for example about 150 Celsius – and should not be heated to temperatures that exceed the maximal allowable temperature. PP id="p-10" id="p-10"

[0010] The high-voltage feedthrough is located at the border of a vacuumed chamber. The vacuumed chamber may be heated during a bake-out that drives out process gases and other contaminants trapped in various objects positioned in the vacuumed chamber. [0011] Due to the presence of residual grease – the maximal temperature of the bakeout is forced to be low – thereby dramatically reducing the effectiveness of the bake-out process. [0012] Furthermore – the grease is absorbed by the feedthrough body or by the plug body - and gradually reduces the inner space defined by the feedthrough body – thereby limiting the lifespan of the feedthrough or the plug. [0013] There is a growing need to provide a scheme that will increase the lifespan of the high-voltage feedthrough and will allow an increment of the bake-out temperature. SUMMARY [0014] There may be provided a high-voltage plug, a high-voltage kit that includes a high-voltage feedthrough plug and a vacuum chamber that includes a high-voltage feedthrough, and a method for providing high-voltage signals to a vacuumed chamber. [0015] There may be provided a method for high-voltage supply to a vacuumed chamber, the method may include providing a high-voltage signal to at least one element within the vacuumed chamber, while vacuum is maintained in the vacuum chamber. The providing of the high-voltage signal is made through a conductive path that comprises a feedthrough conductive element of a high-voltage feedthrough and a plug conductive element of a high-voltage plug. The high-voltage is a voltage that exceeds five hundred volts. During the providing of the high-voltage signal, a plug body is pressed against an interior part of a feedthrough body of the high-voltage feedthrough. The plug body is coated by a first friction reduction coating and surrounds the plug conductive element. BRIEF DESCRIPTION OF THE DRAWINGS [0016] The subject matter regarded as the embodiments of the disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The embodiments of the disclosure, however, both as to organization and method of operation, together with objects, features, and advantages thereof, may best be understood by reference to the following detailed description when read with the accompanying drawings in which: id="p-17" id="p-17"

[0017] FIG. 1 is an example of a high-voltage plug and a high-voltage feedthrough; [0018] FIG. 2 is an example of a vacuumed chamber, a high-voltage plug and a high-voltage feedthrough; [0019] FIG. 3 is an example of a high-voltage plug and a high-voltage feedthrough; [0020] FIG. 4 is an example of a high-voltage plug and a high-voltage feedthrough; and [0021] FIG. 5 is an example of a method. DETAILED DESCRIPTION OF THE DRAWINGS [0022] In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. [0023] However, it will be understood by those skilled in the art that the present embodiments of the disclosure may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail so as not to obscure the present embodiments of the disclosure. [0024] The subject matter regarded as the embodiments of the disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The embodiments of the disclosure, however, both as to organization and method of operation, together with objects, features, and advantages thereof, may best be understood by reference to the following detailed description when read with the accompanying drawings. [0025] It will be appreciated that for simplicity and clarity of illustration, elements shown in the figures have not necessarily been drawn to scale. For example, the dimensions of some of the elements may be exaggerated relative to other elements for clarity. Further, where considered appropriate, reference numerals may be repeated among the figures to indicate corresponding or analogous elements. [0026] Because the illustrated embodiments of the disclosure may for the most part, be implemented using electronic components and circuits known to those skilled in the art, details will not be explained in any greater extent than that considered necessary as illustrated above, for the understanding and appreciation of the underlying concepts of the present embodiments of the disclosure and in order not to obfuscate or distract from the teachings of the present embodiments of the disclosure. [0027] The term "and/or" means additionally or alternatively. id="p-28" id="p-28"

[0028] Figure 1 and figure 2 include examples of high-voltage plug 30, cable 35 and high-voltage feedthrough 20. The high-voltage feedthrough 20 includes a feedthrough body 22 that has one or more interior parts 24 that define an inner space 25 in which the high-voltage plug 30 may be is inserted. The high-voltage feedthrough 20 includes a feedthrough conductive element 21 that extends into the inner space 25 – but may not extend into the inner space. [0029] The high-voltage plug 30 includes plug body 32 and plug conductive element surrounded by the plug body 32. [0030] The exterior of the plug body and the interior of the feedthrough body – that contacts the plug body may be smooth. [0031] In figures 1 and 2 the plug body 32 is coated with a low friction layer or coating – for example a low friction SiC coating and/or SiO coating and/or diamond-like carbon (DLC) coating 33 that may reduce the friction between the high-voltage feedthrough and the high-voltage plug 30. [0032] In figure 2 the feedthrough body 32 is also coated by a low friction layer or coating – for example a low friction SiC coating and/or SiO coating and/or diamond-like carbon (DLC) coating 33. The high-voltage feedthrough and the high-voltage plug may be coated by the same coating – or by different coatings. [0033] The high-voltage plug 30 may be shaped and size to enter the inner space without leaving a gap between the high-voltage plug and the high-voltage feedthrough – especially maintaining the conductive path isolated from the atmospheric environment. [0034] The high-voltage plug 30 may be shaped and size to fully fill the inner space formed by the high-voltage feedthrough. [0035] The high-voltage plug 30 may be slightly bigger than the inner space 25 – and may be inserted by force into the inner space. Slightly bigger may include having a dimension that exceeds by at least 1, 2, 5, 10, 15, 20 percent than a corresponding dimension of the inner space. The difference in dimensions may be a function of the elasticity of the feedthrough body and/or of the feedthrough body – more elasticity allow bigger size differences. [0036] In figure 3, points A-A of the inner space contact points B-B of the plug body. When the high-voltage plug is located outside the inner space – the distance between points A-A may equal the distance (D2 42) between points B-B or may be slightly smaller than the distance (D1 41) between points A-A. [0037] Figure 4 is an example of a vacuumed chamber 52, a high-voltage plug 30 and a high-voltage feedthrough 20. [0038] The high-voltage plug 30 is inserted into the inner space defined by the high- voltage feedthrough 20 without leaving a gap therebetween. The high-voltage feedthrough also interfaces with an interior of the vacuumed chamber 52. [0039] Figure 5 is an example of method 100 of high power supply to a vacuumed chamber. [0040] Method 100 may include step 110 of providing a high-voltage signal to at least one element within the vacuumed chamber, while vacuum is maintained in the vacuum chamber. The providing of the high-voltage signal is made through a conductive path that comprises a feedthrough conductive element of a high-voltage feedthrough and a plug conductive element of a high-voltage plug. During the providing of the high-voltage signal, a plug body that is coated by a friction reduction coating and surrounds the plug conductive element, is pressed against one or more interior parts of a feedthrough body of the high-voltage feedthrough. [0041] The one or more interior parts of a feedthrough body may also be coated with a friction reduction coating. [0042] Step 110 may be followed by step 120 stopping from providing the high-voltage signal through the conductive path. The plug body may be kept pressed against the one or more interior parts of the feedthrough body of the high-voltage feedthrough while no high-voltage signal is provided. The stopping may occur once or multiple times per day, one or multiple times per week, and the like. The high-voltage signals is supplied while activating the vacuumed chamber and/or while activating a tool or unit within the vacuum chamber that requires to receive the high-power signal. [0043] Step 120 may be followed by step 130 of disconnecting the high-voltage plug from the high-voltage feedthrough. This may be done, for example, during maintenance operations. [0044] Multiple iterations of steps 110 and 120 may be executed before executing step 130. id="p-45" id="p-45"

[0045] The vacuumed chamber may undergo a bake-out process after the disconnecting of the high-voltage plug from the high-voltage feedthrough. [0046] In the foregoing specification, the embodiments of the disclosure has been described with reference to specific examples of embodiments of the disclosure. It will, however, be evident that various modifications and changes may be made therein without departing from the broader spirit and scope of the embodiments of the disclosure as set forth in the appended claims. [0047] Moreover, the terms "front," "back," "top," "bottom," "over," "under" and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. It is understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the disclosure described herein are, for example, capable of operation in other orientations than those illustrated or otherwise described herein. [0048] The connections as discussed herein may be any type of connection suitable to transfer signals from or to the respective nodes, units or devices, for example via intermediate devices. Accordingly, unless implied or stated otherwise, the connections may for example be direct connections or indirect connections. The connections may be illustrated or described in reference to be a single connection, a plurality of connections, unidirectional connections, or bidirectional connections. However, different embodiments may vary the implementation of the connections. For example, separate unidirectional connections may be used rather than bidirectional connections and vice versa. Also, plurality of connections may be replaced with a single connection that transfers multiple signals serially or in a time multiplexed manner. Likewise, single connections carrying multiple signals may be separated out into various different connections carrying subsets of these signals. Therefore, many options exist for transferring signals. [0049] Any arrangement of components to achieve the same functionality is effectively "associated" such that the desired functionality is achieved. Hence, any two components herein combined to achieve a particular functionality may be seen as "associated with" each other such that the desired functionality is achieved, irrespective of architectures or intermedial components. Likewise, any two components so associated can also be viewed 30 as being "operably connected," or "operably coupled," to each other to achieve the desired functionality. [0050] Furthermore, those skilled in the art will recognize that boundaries between the above described operations merely illustrative. The multiple operations may be combined into a single operation, a single operation may be distributed in additional operations and operations may be executed at least partially overlapping in time. Moreover, alternative embodiments may include multiple instances of a particular operation, and the order of operations may be altered in various other embodiments. [0051] Also for example, in one embodiment, the illustrated examples may be implemented as circuitry located on a single integrated circuit or within a same device. Alternatively, the examples may be implemented as any number of separate integrated circuits or separate devices interconnected with each other in a suitable manner. [0052] However, other modifications, variations and alternatives are also possible. The specifications and drawings are, accordingly, to be regarded in an illustrative rather than in a restrictive sense. [0053] In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word ‘comprising’ does not exclude the presence of other elements or steps then those listed in a claim. Furthermore, the terms "a" or "an," as used herein, are defined as one or more than one. Also, the use of introductory phrases such as "at least one" and "one or more" in the claims should not be construed to imply that the introduction of another claim element by the indefinite articles "a" or "an" limits any particular claim containing such introduced claim element to embodiments of the disclosure s containing only one such element, even when the same claim includes the introductory phrases "one or more" or "at least one" and indefinite articles such as "a" or "an." The same holds true for the use of definite articles. Unless stated otherwise, terms such as "first" and "second" are used to arbitrarily distinguish between the elements such terms describe. Thus, these terms are not necessarily intended to indicate temporal or other prioritization of such elements. The mere fact that certain measures are recited in mutually different claims does not indicate that a combination of these measures cannot be used to advantage. 30 id="p-54" id="p-54"

[0054] While certain features of the embodiments of the disclosure have been illustrated and described herein, many modifications, substitutions, changes, and equivalents will now occur to those of ordinary skill in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the embodiments of the disclosure. 5

Claims

1./ WE CLAIM 1. A method for high-voltage supply to a vacuumed chamber, the method comprises: providing a high-voltage signal to at least one element within the vacuumed chamber, while vacuum is maintained in the vacuum chamber; wherein the providing of the high-voltage signal is made through a conductive path that comprises a feedthrough conductive element of a high-voltage feedthrough and a plug conductive element of a high-voltage plug; wherein high-voltage is a voltage that exceeds five hundred volts; wherein preceding said providing of the high-voltage signal, a plug body of said high-voltage plug is pressed into and against an interior part of a feedthrough body of the high-voltage feedthrough to electrically connect said feedthrough conductive element and said plug conductive element; wherein the plug body is coated by a first friction reduction coating and surrounds the plug conductive element; wherein said plug conductive element extends through said plug body to make electrical contact with said feedthrough conductive element; and wherein said interior part of said feedthrough body is coated with a second friction reduction coating which maintains its integrity upon temperatures associated with bake-out of said vacuumed chamber.

2. The method according to claim 1, wherein the first friction reduction coating comprises silicon carbide (SiC).

3. The method according to any one of claims 1-2, wherein the first friction reduction coating comprises silicon monoxide (SiO).

4. The method according to any one of claims 1-3, wherein the first friction reduction coating comprises diamond-like carbon (DLC). 295162/

5. The method according to any one of claims 1-4, wherein the first friction reduction coating differs from the second friction reduction coating.

6. The method according to any one of claims 1-5, wherein the second friction reduction coating comprises one or more of, silicon carbide (SiC), silicon monoxide (SiO) and diamond-like carbon (DLC).

7. The method according to any one of claims 1-6, wherein said preceding comprises, forcing said body of the high-voltage plug into the high-voltage feedthrough interior space.

8. The method according to claim 7, wherein said forcing comprises at least one out of (a) compressing the high-voltage plug or (b) expanding an inner space defined by the interior part of said feedthrough body.

9. The method according to any one of claims 1-8, comprising sealing the conductive path from an atmospheric environment that surrounds a high-voltage cable connected to the high voltage plug.

10. The method according to claim 9, wherein the sealing is executed without using grease.

11. The method according to any one of claims 1-10, wherein said plug conductive element extends through said plug body to make electrical contact with said feedthrough conductive element.

12. A system for high-voltage supply to a vacuumed chamber, comprising: a high-voltage feedthrough comprising: a feedthrough body comprising an interior part; and a feedthrough conductive element; 295162/ a high-voltage plug comprising: a plug body, sized and shaped to fit into said feedthrough body interior part, and coated in a first friction reduction coating; and a plug conductive element surrounded by said plug body and configured to make electrical connection with said feedthrough conductive element when said plug body is positioned within said interior part; wherein said plug conductive element extends through said plug body to make electrical contact with said feedthrough conductive element; and wherein said interior part of said feedthrough body is coated with a second friction reduction coating which maintains its integrity upon temperatures associated with bake-out of said vacuumed chamber.

13. The system according to claim 12, wherein said temperatures associated with bake-out comprise temperatures exceeding 150 degrees Celsius.

14. The system according to any one of claims 12-13, wherein said first friction reduction coating comprises one or more of, silicon carbide (SiC), silicon monoxide (SiO) and diamond-like carbon (DLC).

15. The system according to any one of claims 12-14, wherein said second friction reduction coating comprises one or more of, silicon carbide (SiC), silicon monoxide (SiO) and diamond-like carbon (DLC).

16. The system according to any one of claims 12-15, wherein said plug body has a tapered shape.

17. The system according to claim 16, wherein said interior part has a tapered shape matching said plug body tapered shape.

18. The system according to any one of claims 12-17, wherein contact between said plug body and walls of said feedthrough conductive element at said inner space seals 295162/ said electrical connection between said plug conductive element and said feedthrough conductive element from an atmospheric environment.

19. The system according to any one of claims 12-18, wherein, when said plug body is within said interior surface one or both of: said plug body is compressed from an original size; and said interior surface is expanded from an original size.

20. The system according to any one of claims 12-19, wherein said electrical connection between said plug conductive element and said feedthrough conductive element is disposed at a base region of said interior space.

21. They system according to any one of claims 12-20, wherein an external surface of said plug body and an external surface of said interior portion are smooth.

22. A high-voltage feedthrough configured to transfer high voltage to a vacuumed chamber comprising: a feedthrough body comprising an interior part coated in a second friction reduction coating which maintains its integrity upon temperatures associated with bake-out of said vacuumed chamber, where said interior part of said feedthrough body is sized and shaped to receive a plug body, which plug body is coated in a first friction reduction coating; and a feedthrough conductive element configured to make contact with a plug conductive element when said plug body is positioned within said interior part.