Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/IL2013/050697external-prioritypatent/WO2014027354A1/en
Application filed by Nova Measuring Instr LtdfiledCriticalNova Measuring Instr Ltd
Priority to IL237184ApriorityCriticalpatent/IL237184A0/en
Publication of IL237184A0publicationCriticalpatent/IL237184A0/en