IL211761B - Scanning during a stage acceleration in an inspection system - Google Patents

Scanning during a stage acceleration in an inspection system

Info

Publication number
IL211761B
IL211761B IL211761A IL21176111A IL211761B IL 211761 B IL211761 B IL 211761B IL 211761 A IL211761 A IL 211761A IL 21176111 A IL21176111 A IL 21176111A IL 211761 B IL211761 B IL 211761B
Authority
IL
Israel
Prior art keywords
circuit
table board
image
scanning direction
moving
Prior art date
Application number
IL211761A
Other languages
Hebrew (he)
Other versions
IL211761A0 (en
Inventor
Zeevi Danny
Trigoub Eliyahu
Kulik Yehoshua
Original Assignee
Camtek Ltd
Zeevi Danny
Trigoub Eliyahu
Kulik Yehoshua
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd, Zeevi Danny, Trigoub Eliyahu, Kulik Yehoshua filed Critical Camtek Ltd
Publication of IL211761A0 publication Critical patent/IL211761A0/en
Publication of IL211761B publication Critical patent/IL211761B/en

Links

Landscapes

  • Studio Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention provides a system and a method. The method is used to obtain an image of a circuit and includes the steps of moving the table board used to support the circuit along a first scanning direction by changing the rate of the table board generally; generating location signals in the moving period of the table board, wherein each signal indicates the moving of a first distance along the first scanning direction; obtaining image of the circuit area by responding to the location signal and triggering a camera even when the speed of the table board is being changed generally, so as to enable the camera to obtain the circuit image as long as the table board moves a certain distance along the first scanning direction at any rate; and obtaining the image of the area of the circuit.
IL211761A 2010-03-24 2011-03-16 Scanning during a stage acceleration in an inspection system IL211761B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31688710P 2010-03-24 2010-03-24

Publications (2)

Publication Number Publication Date
IL211761A0 IL211761A0 (en) 2011-05-31
IL211761B true IL211761B (en) 2019-06-30

Family

ID=44262746

Family Applications (1)

Application Number Title Priority Date Filing Date
IL211761A IL211761B (en) 2010-03-24 2011-03-16 Scanning during a stage acceleration in an inspection system

Country Status (2)

Country Link
CN (1) CN102262094B (en)
IL (1) IL211761B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211044A (en) * 1981-06-19 1982-12-24 Hajime Sangyo Kk Inspecting device
JPS61273076A (en) * 1985-05-28 1986-12-03 Canon Inc Television camera having pattern projector
JP4348455B2 (en) * 1998-12-09 2009-10-21 レーザーテック株式会社 Imaging device
SG138491A1 (en) * 2006-06-21 2008-01-28 Generic Power Pte Ltd Method and apparatus for 3-dimensional vision and inspection of ball and like protrusions of electronic components

Also Published As

Publication number Publication date
IL211761A0 (en) 2011-05-31
CN102262094B (en) 2015-02-11
CN102262094A (en) 2011-11-30

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