IL173538A0 - Apparatus and method for imaging integrated circuits and the like - Google Patents

Apparatus and method for imaging integrated circuits and the like

Info

Publication number
IL173538A0
IL173538A0 IL173538A IL17353806A IL173538A0 IL 173538 A0 IL173538 A0 IL 173538A0 IL 173538 A IL173538 A IL 173538A IL 17353806 A IL17353806 A IL 17353806A IL 173538 A0 IL173538 A0 IL 173538A0
Authority
IL
Israel
Prior art keywords
integrated circuits
imaging integrated
imaging
circuits
integrated
Prior art date
Application number
IL173538A
Original Assignee
4Id Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 4Id Ltd filed Critical 4Id Ltd
Priority to IL173538A priority Critical patent/IL173538A0/en
Publication of IL173538A0 publication Critical patent/IL173538A0/en
Priority to PCT/IL2007/000145 priority patent/WO2007088552A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0096—Radiation pyrometry, e.g. infrared or optical thermometry for measuring wires, electrical contacts or electronic systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G01N2021/3568—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor applied to semiconductors, e.g. Silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
IL173538A 2006-02-05 2006-02-05 Apparatus and method for imaging integrated circuits and the like IL173538A0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IL173538A IL173538A0 (en) 2006-02-05 2006-02-05 Apparatus and method for imaging integrated circuits and the like
PCT/IL2007/000145 WO2007088552A1 (en) 2006-02-05 2007-02-05 Apparatus and method for imaging integrated circuits and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL173538A IL173538A0 (en) 2006-02-05 2006-02-05 Apparatus and method for imaging integrated circuits and the like

Publications (1)

Publication Number Publication Date
IL173538A0 true IL173538A0 (en) 2006-07-05

Family

ID=37944795

Family Applications (1)

Application Number Title Priority Date Filing Date
IL173538A IL173538A0 (en) 2006-02-05 2006-02-05 Apparatus and method for imaging integrated circuits and the like

Country Status (2)

Country Link
IL (1) IL173538A0 (en)
WO (1) WO2007088552A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8912493B2 (en) 2012-01-13 2014-12-16 Raytheon Company High resolution thermography
JP6160200B2 (en) * 2013-04-18 2017-07-12 株式会社ジェイテクト Optical nondestructive inspection apparatus and optical nondestructive inspection method
CN103630543B (en) * 2013-10-23 2015-10-21 航天材料及工艺研究所 A kind of decision method utilizing pulse infrared thermal wave to detect microwave absorbing coating defect
CN105784121B (en) * 2016-04-01 2018-10-26 华北电力大学 The a wide range of two-dimension temperature field measurement device of nine channel adaptives and its measurement method
CN105910712B (en) * 2016-04-01 2018-10-26 华北电力大学 Five-channel self-adaption two-dimensional temperature field measuring apparatus and its measurement method
US11436823B1 (en) 2019-01-21 2022-09-06 Cyan Systems High resolution fast framing infrared detection system
US11448483B1 (en) 2019-04-29 2022-09-20 Cyan Systems Projectile tracking and 3D traceback method
US11637972B2 (en) 2019-06-28 2023-04-25 Cyan Systems Fast framing moving target imaging system and method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4697923A (en) * 1986-03-25 1987-10-06 Ibm Corporation Method for visual inspection of multilayer printed circuit boards
US5790188A (en) * 1995-09-07 1998-08-04 Flight Landata, Inc. Computer controlled, 3-CCD camera, airborne, variable interference filter imaging spectrometer system
US5686889A (en) * 1996-05-20 1997-11-11 The United States Of America As Represented By The Secretary Of The Army Infrared sniper detection enhancement
SG66376A1 (en) * 1997-07-03 1999-07-20 Inst Of Microlectronics Nation Multiwavelength imaging and spectroscopic photoemission microscope system
US6272204B1 (en) * 1999-02-23 2001-08-07 Cr Technology, Inc. Integrated X-ray and visual inspection systems
US6387715B1 (en) * 1999-09-30 2002-05-14 Advanced Micro Devices, Inc. Integrated circuit defect detection via laser heat and IR thermography
US6834117B1 (en) * 1999-11-30 2004-12-21 Texas Instruments Incorporated X-ray defect detection in integrated circuit metallization
DE10203595A1 (en) * 2002-01-30 2003-08-21 Intego Gmbh Detection of defect locations in transparent sections of glass or plastic, employs illumination source and screen with camera and computerized analysis
JP2004317393A (en) * 2003-04-18 2004-11-11 Shimadzu Corp Two color irradiation thermometer
US6998614B2 (en) * 2003-05-23 2006-02-14 Institute For Technology Development Hyperspectral imaging workstation having visible/near-infrared and ultraviolet image sensors
US20050117145A1 (en) * 2003-11-28 2005-06-02 Joshua Altman Detection of imperfections in precious stones

Also Published As

Publication number Publication date
WO2007088552A1 (en) 2007-08-09
WO2007088552A9 (en) 2007-12-13

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