IL163917A0 - Low contamination components for saemiconductor processing apparatus and methods for making components
- Google Patents
Low contamination components for saemiconductor processing apparatus and methods for making components
Info
Publication number
IL163917A0
IL163917A0IL16391703AIL16391703AIL163917A0IL 163917 A0IL163917 A0IL 163917A0IL 16391703 AIL16391703 AIL 16391703AIL 16391703 AIL16391703 AIL 16391703AIL 163917 A0IL163917 A0IL 163917A0
Authority
IL
Israel
Prior art keywords
components
saemiconductor
methods
processing apparatus
low contamination
Prior art date
Application number
IL16391703A
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res CorpfiledCriticalLam Res Corp
Priority claimed from PCT/US2003/004061external-prioritypatent/WO2003080892A1/en
Publication of IL163917A0publicationCriticalpatent/IL163917A0/en