IL158890A0 - Vacuum chuck - Google Patents

Vacuum chuck

Info

Publication number
IL158890A0
IL158890A0 IL15889003A IL15889003A IL158890A0 IL 158890 A0 IL158890 A0 IL 158890A0 IL 15889003 A IL15889003 A IL 15889003A IL 15889003 A IL15889003 A IL 15889003A IL 158890 A0 IL158890 A0 IL 158890A0
Authority
IL
Israel
Prior art keywords
vacuum chuck
chuck
vacuum
Prior art date
Application number
IL15889003A
Original Assignee
Advanced Dicing Technologies L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Dicing Technologies L filed Critical Advanced Dicing Technologies L
Priority to IL15889003A priority Critical patent/IL158890A0/en
Publication of IL158890A0 publication Critical patent/IL158890A0/en
Priority to PCT/IL2004/001040 priority patent/WO2005048340A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
IL15889003A 2003-11-16 2003-11-16 Vacuum chuck IL158890A0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IL15889003A IL158890A0 (en) 2003-11-16 2003-11-16 Vacuum chuck
PCT/IL2004/001040 WO2005048340A1 (en) 2003-11-16 2004-11-12 Vacuum chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL15889003A IL158890A0 (en) 2003-11-16 2003-11-16 Vacuum chuck

Publications (1)

Publication Number Publication Date
IL158890A0 true IL158890A0 (en) 2004-05-12

Family

ID=34044278

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15889003A IL158890A0 (en) 2003-11-16 2003-11-16 Vacuum chuck

Country Status (2)

Country Link
IL (1) IL158890A0 (en)
WO (1) WO2005048340A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10186438B2 (en) * 2015-11-05 2019-01-22 Infineon Technologies Ag Method and apparatus for use in wafer processing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511384A (en) * 1978-07-11 1980-01-26 Nec Corp Inspection during dicing and system therefor
JPH06232255A (en) * 1993-01-29 1994-08-19 Disco Abrasive Syst Ltd Method of dicing wafer
JPH07201782A (en) * 1994-01-06 1995-08-04 Hitachi Ltd Dicing machine for semiconductor wafer
JP2753814B2 (en) * 1995-03-20 1998-05-20 セイコー精機株式会社 Dicing equipment

Also Published As

Publication number Publication date
WO2005048340A1 (en) 2005-05-26

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