IL152245A0 - Electrostatic chucks - Google Patents

Electrostatic chucks

Info

Publication number
IL152245A0
IL152245A0 IL15224597A IL15224597A IL152245A0 IL 152245 A0 IL152245 A0 IL 152245A0 IL 15224597 A IL15224597 A IL 15224597A IL 15224597 A IL15224597 A IL 15224597A IL 152245 A0 IL152245 A0 IL 152245A0
Authority
IL
Israel
Prior art keywords
electrostatic chucks
chucks
electrostatic
Prior art date
Application number
IL15224597A
Original Assignee
Delsys Pharmaceutical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/630,050 external-priority patent/US5846595A/en
Priority claimed from US08/661,210 external-priority patent/US5858099A/en
Application filed by Delsys Pharmaceutical Corp filed Critical Delsys Pharmaceutical Corp
Publication of IL152245A0 publication Critical patent/IL152245A0/en

Links

IL15224597A 1996-04-09 1997-04-09 Electrostatic chucks IL152245A0 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/630,050 US5846595A (en) 1996-04-09 1996-04-09 Method of making pharmaceutical using electrostatic chuck
US08/661,210 US5858099A (en) 1996-04-09 1996-06-10 Electrostatic chucks and a particle deposition apparatus therefor
PCT/US1997/005352 WO1997038480A1 (en) 1996-04-09 1997-04-09 Electrostatic chucks
IL12650197A IL126501A0 (en) 1996-04-09 1997-04-09 Electrostatic chucks

Publications (1)

Publication Number Publication Date
IL152245A0 true IL152245A0 (en) 2003-05-29

Family

ID=29783037

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15224597A IL152245A0 (en) 1996-04-09 1997-04-09 Electrostatic chucks

Country Status (1)

Country Link
IL (1) IL152245A0 (en)

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