IL152245A0 - Electrostatic chucks - Google Patents
Electrostatic chucksInfo
- Publication number
- IL152245A0 IL152245A0 IL15224597A IL15224597A IL152245A0 IL 152245 A0 IL152245 A0 IL 152245A0 IL 15224597 A IL15224597 A IL 15224597A IL 15224597 A IL15224597 A IL 15224597A IL 152245 A0 IL152245 A0 IL 152245A0
- Authority
- IL
- Israel
- Prior art keywords
- electrostatic chucks
- chucks
- electrostatic
- Prior art date
Links
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/630,050 US5846595A (en) | 1996-04-09 | 1996-04-09 | Method of making pharmaceutical using electrostatic chuck |
US08/661,210 US5858099A (en) | 1996-04-09 | 1996-06-10 | Electrostatic chucks and a particle deposition apparatus therefor |
IL12650197A IL126501A0 (en) | 1996-04-09 | 1997-04-09 | Electrostatic chucks |
PCT/US1997/005352 WO1997038480A1 (en) | 1996-04-09 | 1997-04-09 | Electrostatic chucks |
Publications (1)
Publication Number | Publication Date |
---|---|
IL152245A0 true IL152245A0 (en) | 2003-05-29 |
Family
ID=29783037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15224597A IL152245A0 (en) | 1996-04-09 | 1997-04-09 | Electrostatic chucks |
Country Status (1)
Country | Link |
---|---|
IL (1) | IL152245A0 (en) |
-
1997
- 1997-04-09 IL IL15224597A patent/IL152245A0/en unknown
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