IL121889A0 - Optical inspection method and system - Google Patents

Optical inspection method and system

Info

Publication number
IL121889A0
IL121889A0 IL12188997A IL12188997A IL121889A0 IL 121889 A0 IL121889 A0 IL 121889A0 IL 12188997 A IL12188997 A IL 12188997A IL 12188997 A IL12188997 A IL 12188997A IL 121889 A0 IL121889 A0 IL 121889A0
Authority
IL
Israel
Prior art keywords
inspection method
optical inspection
optical
inspection
Prior art date
Application number
IL12188997A
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to IL12188997A priority Critical patent/IL121889A0/en
Publication of IL121889A0 publication Critical patent/IL121889A0/en
Priority to AU94564/98A priority patent/AU9456498A/en
Priority to PCT/IL1998/000479 priority patent/WO1999018472A1/en
Priority to KR1020007003633A priority patent/KR20010030932A/en
Priority to JP2000515203A priority patent/JP2001519545A/en
Priority to TW087116409A priority patent/TW366475B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
IL12188997A 1997-10-06 1997-10-06 Optical inspection method and system IL121889A0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IL12188997A IL121889A0 (en) 1997-10-06 1997-10-06 Optical inspection method and system
AU94564/98A AU9456498A (en) 1997-10-06 1998-10-01 Optical inspection method and system
PCT/IL1998/000479 WO1999018472A1 (en) 1997-10-06 1998-10-01 Optical inspection method and system
KR1020007003633A KR20010030932A (en) 1997-10-06 1998-10-01 Optical inspection method and system
JP2000515203A JP2001519545A (en) 1997-10-06 1998-10-01 Optical inspection methods and systems
TW087116409A TW366475B (en) 1997-10-06 1998-10-02 Optical inspection method and system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL12188997A IL121889A0 (en) 1997-10-06 1997-10-06 Optical inspection method and system

Publications (1)

Publication Number Publication Date
IL121889A0 true IL121889A0 (en) 1998-03-10

Family

ID=11070707

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12188997A IL121889A0 (en) 1997-10-06 1997-10-06 Optical inspection method and system

Country Status (6)

Country Link
JP (1) JP2001519545A (en)
KR (1) KR20010030932A (en)
AU (1) AU9456498A (en)
IL (1) IL121889A0 (en)
TW (1) TW366475B (en)
WO (1) WO1999018472A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178648A (en) * 1985-02-04 1986-08-11 Seiko Epson Corp Apparatus for inspecting liquid crystal display element
JPH01138476A (en) * 1987-11-25 1989-05-31 Rohm Co Ltd Analyzing device for detective of semiconductor device
JPH03217817A (en) * 1990-01-24 1991-09-25 Nippon Maikuronikusu:Kk Method and device for inspecting liquid crystal dpsplay panel
JPH08292406A (en) * 1995-04-24 1996-11-05 Advantest Corp Lcd panel inspecting device
JPH09257641A (en) * 1996-03-26 1997-10-03 Seiko Epson Corp Method and device for inspecting display surface of liquid crystal panel

Also Published As

Publication number Publication date
AU9456498A (en) 1999-04-27
KR20010030932A (en) 2001-04-16
JP2001519545A (en) 2001-10-23
TW366475B (en) 1999-08-11
WO1999018472A1 (en) 1999-04-15

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