IL120914A0 - Method and apparatus for plasma processing
- Google Patents
Method and apparatus for plasma processing
Info
Publication number
IL120914A0
IL120914A0IL12091496AIL12091496AIL120914A0IL 120914 A0IL120914 A0IL 120914A0IL 12091496 AIL12091496 AIL 12091496AIL 12091496 AIL12091496 AIL 12091496AIL 120914 A0IL120914 A0IL 120914A0
Authority
IL
Israel
Prior art keywords
plasma processing
plasma
processing
Prior art date
Application number
IL12091496A
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft CofiledCriticalHughes Aircraft Co
Priority claimed from PCT/US1996/016210external-prioritypatent/WO1997014172A1/en
Publication of IL120914A0publicationCriticalpatent/IL120914A0/en