IL120914A0 - Method and apparatus for plasma processing - Google Patents

Method and apparatus for plasma processing

Info

Publication number
IL120914A0
IL120914A0 IL12091496A IL12091496A IL120914A0 IL 120914 A0 IL120914 A0 IL 120914A0 IL 12091496 A IL12091496 A IL 12091496A IL 12091496 A IL12091496 A IL 12091496A IL 120914 A0 IL120914 A0 IL 120914A0
Authority
IL
Israel
Prior art keywords
plasma processing
plasma
processing
Prior art date
Application number
IL12091496A
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Priority claimed from PCT/US1996/016210 external-priority patent/WO1997014172A1/en
Publication of IL120914A0 publication Critical patent/IL120914A0/en

Links

IL12091496A 1996-10-10 1996-10-10 Method and apparatus for plasma processing IL120914A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/US1996/016210 WO1997014172A1 (en) 1995-10-12 1996-10-10 Method and apparatus for plasma processing
US54346896A 1996-10-12 1996-10-12

Publications (1)

Publication Number Publication Date
IL120914A0 true IL120914A0 (en) 1997-09-30

Family

ID=24168202

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12091496A IL120914A0 (en) 1996-10-10 1996-10-10 Method and apparatus for plasma processing

Country Status (1)

Country Link
IL (1) IL120914A0 (en)

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