ID838B - Lapisan alat pengukur tegangan yang tipis, metode pembuatannya dan pemakaiannya pada suatu transduser tekanan - Google Patents

Lapisan alat pengukur tegangan yang tipis, metode pembuatannya dan pemakaiannya pada suatu transduser tekanan

Info

Publication number
ID838B
ID838B IDP383392A ID923833A ID838B ID 838 B ID838 B ID 838B ID P383392 A IDP383392 A ID P383392A ID 923833 A ID923833 A ID 923833A ID 838 B ID838 B ID 838B
Authority
ID
Indonesia
Prior art keywords
transduser
making
pressure
strength measurement
layer types
Prior art date
Application number
IDP383392A
Other languages
English (en)
Indonesian (id)
Inventor
Petitjean Luc
Bonnin Eric
Rezgui Fadhel
Original Assignee
Schlumberger Technology Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technology Bv filed Critical Schlumberger Technology Bv
Publication of ID838B publication Critical patent/ID838B/id

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Force In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
IDP383392A 1991-07-26 1992-07-25 Lapisan alat pengukur tegangan yang tipis, metode pembuatannya dan pemakaiannya pada suatu transduser tekanan ID838B (id)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9109480A FR2679651B1 (fr) 1991-07-26 1991-07-26 Couche mince extensometrique en cermet a base de tantale et de nitrate de tantale, son procede de preparation et son utilisation dans un capteur de pression.

Publications (1)

Publication Number Publication Date
ID838B true ID838B (id) 1996-07-29

Family

ID=9415570

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP383392A ID838B (id) 1991-07-26 1992-07-25 Lapisan alat pengukur tegangan yang tipis, metode pembuatannya dan pemakaiannya pada suatu transduser tekanan

Country Status (7)

Country Link
EP (1) EP0526290B1 (fr)
JP (1) JPH06212402A (fr)
AU (1) AU647292B2 (fr)
DE (1) DE69204936T2 (fr)
FR (1) FR2679651B1 (fr)
ID (1) ID838B (fr)
NO (1) NO303412B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
JP3932302B2 (ja) * 2000-12-27 2007-06-20 独立行政法人産業技術総合研究所 圧力センサ
AT8066U1 (de) * 2005-04-28 2006-01-15 Plansee Ag Verfahren zur herstellung einer tanx schicht
EP1783782A1 (fr) 2005-11-02 2007-05-09 Services Petroliers Schlumberger La couche mince d'impédance élevée pour la jauge de contrainte
DE102013007644B4 (de) 2013-05-06 2017-09-21 Hochschule Für Technik Und Wirtschaft Des Saarlandes Anordnung zur Messung einer Dehnung, eines Druckes oder einer Kraft mit einer Widerstandsschicht

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE634012A (fr) * 1961-10-03
JPS54134461A (en) * 1978-04-11 1979-10-18 Nippon Telegr & Teleph Corp <Ntt> Thin film strain gauge
US4325048A (en) * 1980-02-29 1982-04-13 Gould Inc. Deformable flexure element for strain gage transducer and method of manufacture
FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole

Also Published As

Publication number Publication date
DE69204936D1 (de) 1995-10-26
NO303412B1 (no) 1998-07-06
DE69204936T2 (de) 1996-05-15
NO922943D0 (no) 1992-07-24
FR2679651B1 (fr) 1993-11-12
EP0526290B1 (fr) 1995-09-20
EP0526290A1 (fr) 1993-02-03
JPH06212402A (ja) 1994-08-02
AU2050992A (en) 1993-01-28
AU647292B2 (en) 1994-03-17
FR2679651A1 (fr) 1993-01-29
NO922943L (no) 1993-01-27

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