HUT58950A - Modified magnet arrangement, favourably to penning atomizer source - Google Patents

Modified magnet arrangement, favourably to penning atomizer source

Info

Publication number
HUT58950A
HUT58950A HU409490A HU409490A HUT58950A HU T58950 A HUT58950 A HU T58950A HU 409490 A HU409490 A HU 409490A HU 409490 A HU409490 A HU 409490A HU T58950 A HUT58950 A HU T58950A
Authority
HU
Hungary
Prior art keywords
penning
favourably
magnet arrangement
modified magnet
atomizer
Prior art date
Application number
HU409490A
Other languages
Hungarian (hu)
Other versions
HU904094D0 (en
HU207605B (en
Inventor
Gabor Kertesz
Gyoergy Vago
Original Assignee
Gabor Kertesz
Gyoergy Vago
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gabor Kertesz, Gyoergy Vago filed Critical Gabor Kertesz
Priority to HU409490A priority Critical patent/HU207605B/en
Publication of HU904094D0 publication Critical patent/HU904094D0/en
Publication of HUT58950A publication Critical patent/HUT58950A/en
Publication of HU207605B publication Critical patent/HU207605B/en

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Special Spraying Apparatus (AREA)

Abstract

A new magnet element is prepd. by placing concentric circles of magnets of different dias. along the longitudinal axis.(Dwg.0/0)
HU409490A 1990-07-05 1990-07-05 Penning spray source having modified magnet arrangement HU207605B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
HU409490A HU207605B (en) 1990-07-05 1990-07-05 Penning spray source having modified magnet arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU409490A HU207605B (en) 1990-07-05 1990-07-05 Penning spray source having modified magnet arrangement

Publications (3)

Publication Number Publication Date
HU904094D0 HU904094D0 (en) 1990-12-28
HUT58950A true HUT58950A (en) 1992-03-30
HU207605B HU207605B (en) 1993-04-28

Family

ID=10966867

Family Applications (1)

Application Number Title Priority Date Filing Date
HU409490A HU207605B (en) 1990-07-05 1990-07-05 Penning spray source having modified magnet arrangement

Country Status (1)

Country Link
HU (1) HU207605B (en)

Also Published As

Publication number Publication date
HU904094D0 (en) 1990-12-28
HU207605B (en) 1993-04-28

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Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee