HUT58833A - Process for electrohemical solving semiconductive materials for determining alternation of semiconductive additive's concentration in deep layers - Google Patents

Process for electrohemical solving semiconductive materials for determining alternation of semiconductive additive's concentration in deep layers

Info

Publication number
HUT58833A
HUT58833A HU904176A HU417690A HUT58833A HU T58833 A HUT58833 A HU T58833A HU 904176 A HU904176 A HU 904176A HU 417690 A HU417690 A HU 417690A HU T58833 A HUT58833 A HU T58833A
Authority
HU
Hungary
Prior art keywords
semiconductive
electrohemical
alternation
solving
concentration
Prior art date
Application number
HU904176A
Other languages
English (en)
Other versions
HU904176D0 (en
HU213196B (en
Inventor
Tamas Horanyi
Peter Tuettoe
Gabor Endredi
Original Assignee
Semilab Felvezetoe Fiz Lab Rt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semilab Felvezetoe Fiz Lab Rt filed Critical Semilab Felvezetoe Fiz Lab Rt
Priority to HU904176A priority Critical patent/HU213196B/hu
Publication of HU904176D0 publication Critical patent/HU904176D0/hu
Priority to PCT/HU1991/000034 priority patent/WO1992001311A1/en
Priority to EP91912816A priority patent/EP0538334A1/en
Priority to CA002087192A priority patent/CA2087192A1/en
Priority to US07/728,609 priority patent/US5202018A/en
Priority to JP3512037A priority patent/JPH06502513A/ja
Publication of HUT58833A publication Critical patent/HUT58833A/hu
Publication of HU213196B publication Critical patent/HU213196B/hu

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • H01L21/30635—Electrolytic etching of AIIIBV compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/09—Wave forms

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
HU904176A 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials HU213196B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials
PCT/HU1991/000034 WO1992001311A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
EP91912816A EP0538334A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
CA002087192A CA2087192A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
US07/728,609 US5202018A (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
JP3512037A JPH06502513A (ja) 1990-07-12 1991-07-11 半導体の電気化学的溶解法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials

Publications (3)

Publication Number Publication Date
HU904176D0 HU904176D0 (en) 1990-12-28
HUT58833A true HUT58833A (en) 1992-03-30
HU213196B HU213196B (en) 1997-03-28

Family

ID=10967212

Family Applications (1)

Application Number Title Priority Date Filing Date
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials

Country Status (6)

Country Link
US (1) US5202018A (hu)
EP (1) EP0538334A1 (hu)
JP (1) JPH06502513A (hu)
CA (1) CA2087192A1 (hu)
HU (1) HU213196B (hu)
WO (1) WO1992001311A1 (hu)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2684801B1 (fr) * 1991-12-06 1997-01-24 Picogiga Sa Procede de realisation de composants semiconducteurs, notamment sur gaas ou inp, avec recuperation du substrat par voie chimique.
FR2690278A1 (fr) * 1992-04-15 1993-10-22 Picogiga Sa Composant photovoltaïque multispectral à empilement de cellules, et procédé de réalisation.
US5486280A (en) * 1994-10-20 1996-01-23 Martin Marietta Energy Systems, Inc. Process for applying control variables having fractal structures
US5767693A (en) * 1996-09-04 1998-06-16 Smithley Instruments, Inc. Method and apparatus for measurement of mobile charges with a corona screen gun
US6060709A (en) * 1997-12-31 2000-05-09 Verkuil; Roger L. Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
US6882045B2 (en) * 1999-10-28 2005-04-19 Thomas J. Massingill Multi-chip module and method for forming and method for deplating defective capacitors
AU2002224453A1 (en) 2000-10-11 2002-04-22 Microchips, Inc. Microchip reservoir devices and facilitated corrosion of electrodes
US6875208B2 (en) 2001-05-31 2005-04-05 Massachusetts Institute Of Technology Microchip devices with improved reservoir opening
US7537590B2 (en) * 2004-07-30 2009-05-26 Microchips, Inc. Multi-reservoir device for transdermal drug delivery and sensing
EP1791643B1 (en) 2004-09-01 2009-03-11 Microchips, Inc. Multi-cap reservoir devices for controlled release or exposure of reservoir contents

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168212A (en) * 1974-05-16 1979-09-18 The Post Office Determining semiconductor characteristic
US4028207A (en) * 1975-05-16 1977-06-07 The Post Office Measuring arrangements
US4154663A (en) * 1978-02-17 1979-05-15 Texas Instruments Incorporated Method of providing thinned layer of epitaxial semiconductor material having substantially uniform reverse breakdown voltage characteristic
US4369099A (en) * 1981-01-08 1983-01-18 Bell Telephone Laboratories, Incorporated Photoelectrochemical etching of semiconductors
US4627900A (en) * 1982-08-27 1986-12-09 Amax Inc. Electrochemical dissolution and control of nickel sulfide scale
HU199020B (en) * 1987-05-04 1989-12-28 Magyar Tudomanyos Akademia Method and apparatus for measuring the layer thickness of semiconductor layer structures
SU1546514A1 (ru) * 1987-07-10 1990-02-28 Институт Органического Синтеза И Углехимии Ан Казсср Способ получени сульфата двухвалентного свинца
SU1475993A1 (ru) * 1987-09-10 1989-04-30 Всесоюзный Научно-Исследовательский Институт Химических Реактивов И Особо Чистых Химических Веществ Устройство дл электрохимического растворени металлов

Also Published As

Publication number Publication date
CA2087192A1 (en) 1992-01-13
HU904176D0 (en) 1990-12-28
EP0538334A1 (en) 1993-04-28
WO1992001311A1 (en) 1992-01-23
HU213196B (en) 1997-03-28
US5202018A (en) 1993-04-13
JPH06502513A (ja) 1994-03-17

Similar Documents

Publication Publication Date Title
FI98762B (fi) Säiliön viimeistelyn tarkastus
FR2596365B1 (fr) Receptacle pour la presentation d'articles
HUT58833A (en) Process for electrohemical solving semiconductive materials for determining alternation of semiconductive additive's concentration in deep layers
EP0295080A3 (en) Twin belt type casting machine and method of casting by using the same
GB9219769D0 (en) Method of determining travel time in drillstring
GB8901111D0 (en) Apparatus for use in detecting the presence of liquid
GB2225639B (en) Apparatus for determining the amount of paramagnetic substance in a mixture
EP0484003A3 (en) Method of determining blend time of liquids
ITRM910168A0 (it) Procedimento ed apparecchio per l'analisi non distruttiva continua di provini a forma di barre.
DE3461837D1 (en) Method of post-treating textile materials in rope form in jet-dyeing apparatuses
HU904177D0 (en) Process and apparatus for measurement of concentration and change thereof by depth of charge carriers in semiconductor materials, their layered structures and devices
FR2544350B1 (fr) Appareil pour l'aiguilletage de bandes de matiere
DE3474965D1 (en) New process for the preparation of 20-keto-delta16-steroids and new intermediate compounds formed in this process
EP0266753A3 (en) Method and apparatus for carrying out measurements permitting the evaluation of the flow properties of thermoplastic materials
GB9013202D0 (en) Measurement of concentration of material
RU1821683C (en) Method for measuring surface tension of liquid
GB8824692D0 (en) Method for determining concentration of cross-linking agent
IT8303549A0 (it) Apparecchiatura per la polimerizzazione in profondita' dimateriali sintetici polimerizzanti
BG46222A1 (en) Method for evaluation of bacteria's sensitivity to chemical substances
GB8912798D0 (en) Measurement of concentration of material
GB8912799D0 (en) Measurement of concentration of material
IT1178238B (it) Procedimento per l'ottenimento di pezzi iniettati colorati superficialmente
CS211187A1 (en) Method of materials' surface layers' orientation determination in products
CS168087A1 (en) Process for the concentration of 1-methoxy-2-propanone in mixtures thereof with 1-methoxy-2-propanolom
IL92047A0 (en) Biosensors for measurements of ligands

Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee