HUT58833A - Process for electrohemical solving semiconductive materials for determining alternation of semiconductive additive's concentration in deep layers - Google Patents

Process for electrohemical solving semiconductive materials for determining alternation of semiconductive additive's concentration in deep layers

Info

Publication number
HUT58833A
HUT58833A HU904176A HU417690A HUT58833A HU T58833 A HUT58833 A HU T58833A HU 904176 A HU904176 A HU 904176A HU 417690 A HU417690 A HU 417690A HU T58833 A HUT58833 A HU T58833A
Authority
HU
Hungary
Prior art keywords
semiconductive
electrohemical
alternation
solving
concentration
Prior art date
Application number
HU904176A
Other languages
English (en)
Other versions
HU904176D0 (en
HU213196B (en
Inventor
Tamas Horanyi
Peter Tuettoe
Gabor Endredi
Original Assignee
Semilab Felvezetoe Fiz Lab Rt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semilab Felvezetoe Fiz Lab Rt filed Critical Semilab Felvezetoe Fiz Lab Rt
Priority to HU904176A priority Critical patent/HU213196B/hu
Publication of HU904176D0 publication Critical patent/HU904176D0/hu
Priority to PCT/HU1991/000034 priority patent/WO1992001311A1/en
Priority to CA002087192A priority patent/CA2087192A1/en
Priority to JP3512037A priority patent/JPH06502513A/ja
Priority to US07/728,609 priority patent/US5202018A/en
Priority to EP91912816A priority patent/EP0538334A1/en
Publication of HUT58833A publication Critical patent/HUT58833A/hu
Publication of HU213196B publication Critical patent/HU213196B/hu

Links

Classifications

    • H10P50/617
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00Chemistry: electrical and wave energy
    • Y10S204/09Wave forms
HU904176A 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials HU213196B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials
PCT/HU1991/000034 WO1992001311A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
CA002087192A CA2087192A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
JP3512037A JPH06502513A (ja) 1990-07-12 1991-07-11 半導体の電気化学的溶解法
US07/728,609 US5202018A (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors
EP91912816A EP0538334A1 (en) 1990-07-12 1991-07-11 Process for electrochemical dissolution of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials

Publications (3)

Publication Number Publication Date
HU904176D0 HU904176D0 (en) 1990-12-28
HUT58833A true HUT58833A (en) 1992-03-30
HU213196B HU213196B (en) 1997-03-28

Family

ID=10967212

Family Applications (1)

Application Number Title Priority Date Filing Date
HU904176A HU213196B (en) 1990-07-12 1990-07-12 Process for electrochemical solving semiconductive materials and process for measuring parameters of semiconductive materials dependent on depth as a function of depth by electrochemical solving of semiconductive materials

Country Status (6)

Country Link
US (1) US5202018A (hu)
EP (1) EP0538334A1 (hu)
JP (1) JPH06502513A (hu)
CA (1) CA2087192A1 (hu)
HU (1) HU213196B (hu)
WO (1) WO1992001311A1 (hu)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2684801B1 (fr) * 1991-12-06 1997-01-24 Picogiga Sa Procede de realisation de composants semiconducteurs, notamment sur gaas ou inp, avec recuperation du substrat par voie chimique.
FR2690278A1 (fr) * 1992-04-15 1993-10-22 Picogiga Sa Composant photovoltaïque multispectral à empilement de cellules, et procédé de réalisation.
US5486280A (en) * 1994-10-20 1996-01-23 Martin Marietta Energy Systems, Inc. Process for applying control variables having fractal structures
US5767693A (en) * 1996-09-04 1998-06-16 Smithley Instruments, Inc. Method and apparatus for measurement of mobile charges with a corona screen gun
US6060709A (en) * 1997-12-31 2000-05-09 Verkuil; Roger L. Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
US6882045B2 (en) * 1999-10-28 2005-04-19 Thomas J. Massingill Multi-chip module and method for forming and method for deplating defective capacitors
AU2002224453A1 (en) 2000-10-11 2002-04-22 Microchips, Inc. Microchip reservoir devices and facilitated corrosion of electrodes
WO2002099457A1 (en) 2001-05-31 2002-12-12 Massachusetts Inst Technology Microchip devices with improved reservoir opening
WO2006015299A2 (en) * 2004-07-30 2006-02-09 Microchips, Inc. Multi-reservoir device for transdermal drug delivery and sensing
DE602005013253D1 (de) * 2004-09-01 2009-04-23 Microchips Inc Behältervorrichtungen mit mehreren verschlüssen zur gesteuerten abgabe oder exponierung des behälterinhalts

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168212A (en) * 1974-05-16 1979-09-18 The Post Office Determining semiconductor characteristic
US4028207A (en) * 1975-05-16 1977-06-07 The Post Office Measuring arrangements
US4154663A (en) * 1978-02-17 1979-05-15 Texas Instruments Incorporated Method of providing thinned layer of epitaxial semiconductor material having substantially uniform reverse breakdown voltage characteristic
US4369099A (en) * 1981-01-08 1983-01-18 Bell Telephone Laboratories, Incorporated Photoelectrochemical etching of semiconductors
US4627900A (en) * 1982-08-27 1986-12-09 Amax Inc. Electrochemical dissolution and control of nickel sulfide scale
HU199020B (en) * 1987-05-04 1989-12-28 Magyar Tudomanyos Akademia Method and apparatus for measuring the layer thickness of semiconductor layer structures
SU1546514A1 (ru) * 1987-07-10 1990-02-28 Институт Органического Синтеза И Углехимии Ан Казсср Способ получени сульфата двухвалентного свинца
SU1475993A1 (ru) * 1987-09-10 1989-04-30 Всесоюзный Научно-Исследовательский Институт Химических Реактивов И Особо Чистых Химических Веществ Устройство дл электрохимического растворени металлов

Also Published As

Publication number Publication date
HU904176D0 (en) 1990-12-28
HU213196B (en) 1997-03-28
JPH06502513A (ja) 1994-03-17
WO1992001311A1 (en) 1992-01-23
US5202018A (en) 1993-04-13
CA2087192A1 (en) 1992-01-13
EP0538334A1 (en) 1993-04-28

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Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee