HUT39008A - Device for measuring the profile height of patterns of solid surface - Google Patents

Device for measuring the profile height of patterns of solid surface

Info

Publication number
HUT39008A
HUT39008A HU453084A HU453084A HUT39008A HU T39008 A HUT39008 A HU T39008A HU 453084 A HU453084 A HU 453084A HU 453084 A HU453084 A HU 453084A HU T39008 A HUT39008 A HU T39008A
Authority
HU
Hungary
Prior art keywords
patterns
measuring
solid surface
profile height
profile
Prior art date
Application number
HU453084A
Other languages
Hungarian (hu)
Other versions
HU197627B (en
Inventor
Istvan Balint
Ferenc Engard
Janos Giber
Laszlo Kocsanyi
Emoeke Loerincz
Peter Richter
Imre Peczeli
Bela Vagi
Original Assignee
Budapesti Mueszaki Egyetem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Budapesti Mueszaki Egyetem filed Critical Budapesti Mueszaki Egyetem
Priority to HU453084A priority Critical patent/HU197627B/en
Publication of HUT39008A publication Critical patent/HUT39008A/en
Publication of HU197627B publication Critical patent/HU197627B/en

Links

HU453084A 1984-12-06 1984-12-06 Device for measuring prifile height of the samples with solid surface HU197627B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
HU453084A HU197627B (en) 1984-12-06 1984-12-06 Device for measuring prifile height of the samples with solid surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU453084A HU197627B (en) 1984-12-06 1984-12-06 Device for measuring prifile height of the samples with solid surface

Publications (2)

Publication Number Publication Date
HUT39008A true HUT39008A (en) 1986-07-28
HU197627B HU197627B (en) 1989-04-28

Family

ID=10968226

Family Applications (1)

Application Number Title Priority Date Filing Date
HU453084A HU197627B (en) 1984-12-06 1984-12-06 Device for measuring prifile height of the samples with solid surface

Country Status (1)

Country Link
HU (1) HU197627B (en)

Also Published As

Publication number Publication date
HU197627B (en) 1989-04-28

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Legal Events

Date Code Title Description
HU90 Patent valid on 900628
HMM4 Cancellation of final prot. due to non-payment of fee