HUT34659A - Double layer photolithographic method - Google Patents

Double layer photolithographic method

Info

Publication number
HUT34659A
HUT34659A HU234583A HU234583A HUT34659A HU T34659 A HUT34659 A HU T34659A HU 234583 A HU234583 A HU 234583A HU 234583 A HU234583 A HU 234583A HU T34659 A HUT34659 A HU T34659A
Authority
HU
Hungary
Prior art keywords
double layer
photolithographic method
layer photolithographic
double
photolithographic
Prior art date
Application number
HU234583A
Other languages
Hungarian (hu)
Other versions
HU193170B (en
Inventor
Karolyne V E Baka
Istvanne Szentivanyi
Original Assignee
Mta Koezpoenti Fiz Kutato Inte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mta Koezpoenti Fiz Kutato Inte filed Critical Mta Koezpoenti Fiz Kutato Inte
Priority to HU234583A priority Critical patent/HU193170B/en
Publication of HUT34659A publication Critical patent/HUT34659A/en
Publication of HU193170B publication Critical patent/HU193170B/en

Links

HU234583A 1983-06-29 1983-06-29 Double layer photolithographic method HU193170B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
HU234583A HU193170B (en) 1983-06-29 1983-06-29 Double layer photolithographic method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU234583A HU193170B (en) 1983-06-29 1983-06-29 Double layer photolithographic method

Publications (2)

Publication Number Publication Date
HUT34659A true HUT34659A (en) 1985-03-28
HU193170B HU193170B (en) 1987-08-28

Family

ID=10958933

Family Applications (1)

Application Number Title Priority Date Filing Date
HU234583A HU193170B (en) 1983-06-29 1983-06-29 Double layer photolithographic method

Country Status (1)

Country Link
HU (1) HU193170B (en)

Also Published As

Publication number Publication date
HU193170B (en) 1987-08-28

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Legal Events

Date Code Title Description
HU90 Patent valid on 900628
HMM4 Cancellation of final prot. due to non-payment of fee